Issued Patents All Time
Showing 51–75 of 78 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8834732 | Plasma uniformity control using biased array | — | 2014-09-16 |
| 8809800 | Ion source and a method for in-situ cleaning thereof | Christopher Campbell, Craig R. Chaney, Robert C. Lindberg, Wilhelm P. Platow, Alexander S. Perel | 2014-08-19 |
| 8756021 | Method and system for in-situ monitoring of cathode erosion and predicting cathode lifetime | Russell J. Low, Kevin M. Daniels, Richard M. White, James W. Blanchette | 2014-06-17 |
| 8698107 | Technique and apparatus for monitoring ion mass, energy, and angle in processing systems | Ludovic Godet, Christopher J. Leavitt, Anthony Renau | 2014-04-15 |
| 8669538 | Method of improving ion beam quality in an implant system | Christopher J. Leavitt, Peter F. Kurunczi, Timothy J. Miller, Svetlana B. Radovanov | 2014-03-11 |
| 8604449 | Glitch control during implantation | Piotr Lubicki | 2013-12-10 |
| 8501624 | Excited gas injection for ion implant control | Victor M. Benveniste, Christopher A. Rowland, Craig R. Chaney, Frank Sinclair, Neil J. Bassom | 2013-08-06 |
| 8481960 | Deceleration lens | Svetlana B. Radovanov, Jason M. Schaller, Richard M. White, Kevin Verrier, James W. Blanchette +2 more | 2013-07-09 |
| 8466431 | Techniques for improving extracted ion beam quality using high-transparency electrodes | James S. Buff, Svetlana B. Radovanov, Wilhelm P. Platow, Frank Sinclair, D. Jeffrey Lischer +7 more | 2013-06-18 |
| 8461558 | System and method for ion implantation with dual purpose mask | Richard M. White, Kevin M. Daniels | 2013-06-11 |
| 8436318 | Apparatus for controlling the temperature of an RF ion source window | Frank Sinclair, Costel Biloiu, Victor M. Benveniste, Shardul S. Patel | 2013-05-07 |
| 8357912 | Techniques for providing a multimode ion source | Svetlana B. Radovanov, Frank Sinclair, Victor M. Benveniste | 2013-01-22 |
| 8329055 | Plasma uniformity control using biased array | — | 2012-12-11 |
| 8188448 | Temperature controlled ion source | Victor M. Benveniste, Shardul S. Patel, Frank Sinclair | 2012-05-29 |
| 8183542 | Temperature controlled ion source | Victor M. Benveniste, Shardul S. Patel, Frank Sinclair | 2012-05-22 |
| 8072149 | Unbalanced ion source | Jeong-Ha Cho, Byung-Yeal Yoon, Yong Tae Kim, Jeong Ho Yoon | 2011-12-06 |
| 7888636 | Measuring energy contamination using time-of-flight techniques | Jonathan Gerald England | 2011-02-15 |
| 7888662 | Ion source cleaning method and apparatus | Costel Biloiu, Craig R. Chaney, Eric R. Cobb, Wilhelm P. Platow | 2011-02-15 |
| 7878145 | Monitoring plasma ion implantation systems for fault detection and process control | Ziwei Fang, Sung-Cheon Ko, Edmund J. Winder, Daniel Distaso, Ludovic Godet +1 more | 2011-02-01 |
| 7820988 | Implant uniformity control | Victor M. Benveniste, Antonella Cucchetti | 2010-10-26 |
| 7723707 | Techniques for plasma injection | Victor M. Benveniste, Gordon C. Angel, Kourosh Saadatmand | 2010-05-25 |
| 7700925 | Techniques for providing a multimode ion source | Svetlana B. Radovanov, Frank Sinclair, Victor M. Benveniste | 2010-04-20 |
| 7692139 | Techniques for commensurate cusp-field for effective ion beam neutralization | Frank Sinclair | 2010-04-06 |
| 7675730 | Techniques for detecting wafer charging in a plasma processing system | Steven R. Walther, Bernard G. Lindsay | 2010-03-09 |
| 7476849 | Technique for monitoring and controlling a plasma process | Ludovic Godet, Vassilis Panayotis Vourloumis, Vikram Singh, Ziwei Fang | 2009-01-13 |