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Steven R. Sherman

VA Varian Semiconductor Equipment Associates: 13 patents #55 of 513Top 15%
TE Tel Epion: 6 patents #14 of 54Top 30%
Applied Materials: 2 patents #3,641 of 7,310Top 50%
UE US Dept of Energy: 1 patents #1,355 of 5,099Top 30%
📍 Newton, MA: #241 of 2,747 inventorsTop 9%
🗺 Massachusetts: #4,915 of 88,656 inventorsTop 6%
Overall (All Time): #193,691 of 4,157,543Top 5%
22
Patents All Time

Issued Patents All Time

Showing 1–22 of 22 patents

Patent #TitleCo-InventorsDate
11217448 Methods for reducing transfer pattern defects in a semiconductor device Regina Freed, Nadine Alexis, Lin Zhou 2022-01-04
10971368 Techniques for processing substrates using directional reactive ion etching Simon Ruffell, John Hautala, Adam Brand 2021-04-06
10777414 Methods for reducing transfer pattern defects in a semiconductor device Regina Freed, Nadine Alexis, Lin Zhou 2020-09-15
10629437 Techniques and structure for forming dynamic random-access device using angled ions Sony Varghese, John Hautala, Rajesh Prasad, Min Gyu Sung 2020-04-21
10332748 Etch rate modulation through ion implantation Rajesh Prasad, Andrew Waite, Sungho Jo, Kyu-Ha Shim, Guy Oteri +1 more 2019-06-25
10310379 Multiple patterning approach using ion implantation Tristan Y. Ma, Maureen Petterson, John Hautala 2019-06-04
10229832 Techniques for forming patterned features using directional ions John Hautala, Simon Ruffell 2019-03-12
10204909 Non-uniform gate oxide thickness for DRAM device Simon Ruffell, Arvind Kumar, Tristan Y. Ma, Kyu-Ha Shim, John Hautala 2019-02-12
9934981 Techniques for processing substrates using directional reactive ion etching Simon Ruffell, John Hautala, Adam Brand 2018-04-03
9934982 Etch rate modulation through ion implantation Rajesh Prasad, Andrew Waite, Sungho Jo, Kyu-Ha Shim, Guy Oteri +1 more 2018-04-03
9728623 Replacement metal gate transistor Ying Zhang 2017-08-08
9613813 Method for improving critical dimension variability by implanting argon or silicon ions into a patterned mask Todd Henry 2017-04-04
9153444 Process flow for replacement metal gate transistors Ying Zhang 2015-10-06
9082949 Magnetic memory and method of fabrication Alexander C. Kontos, John Hautala, Simon Ruffell 2015-07-14
8946836 Magnetic memory and method of fabrication Alexander C. Kontos, John Hautala, Simon Ruffell 2015-02-03
8192805 Method to improve electrical leakage performance and to minimize electromigration in semiconductor devices Noel Russell, John Hautala 2012-06-05
7981483 Method to improve electrical leakage performance and to minimize electromigration in semiconductor devices Noel Russell, John Hautala 2011-07-19
7838423 Method of forming capping structures on one or more material layer surfaces Arthur J. Learn, Robert M. Geffken, John Hautala 2010-11-23
7799683 Copper interconnect wiring and method and apparatus for forming thereof Arthur J. Learn, Robert M. Geffken, John Hautala 2010-09-21
7754588 Method to improve a copper/dielectric interface in semiconductor devices Noel Russell, John Hautala 2010-07-13
7291558 Copper interconnect wiring and method of forming thereof Robert M. Geffken, John Hautala, Arthur J. Learn 2007-11-06
6919061 In-situ method for treating residual sodium S. Paul Henslee 2005-07-19