Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6257827 | Apparatus and method for transporting substrates | Peter van der Meulen | 2001-07-10 |
| 5778968 | Method for heating or cooling wafers | Christopher Hofmeister, Richard S. Muka | 1998-07-14 |
| 5180276 | Articulated arm transfer device | — | 1993-01-19 |