Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6863736 | Shaft cooling mechanisms | Richard S. Muka, Steven Richards | 2005-03-08 |
| 6815696 | Beam stop for use in an ion implantation system | Steven Richards, Christopher W. Berry | 2004-11-09 |
| 6794662 | Thermosetting resin wafer-holding pin | Steven Richards, Julian G. Blake | 2004-09-21 |