Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6863773 | Linearly extended device for large-surface microwave treatment and for large surface plasma production | Rudolf Emmerich, Mathias Kaiser, Urban Helfried, Peter Elsner, Klaus Baumgartner +1 more | 2005-03-08 |
| 5053244 | Process for depositing silicon oxide on a substrate | Jorg Kieser, Michael Geisler, Rolf Wilhelm | 1991-10-01 |
| 4939424 | Apparatus for producing a plasma and for the treatment of substrates | Jorg Kieser, Michael Geisler, Rolf Wilhelm | 1990-07-03 |