Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5520538 | Low-gas temperature stabilization system | — | 1996-05-28 |
| 5447431 | Low-gas temperature stabilization system | — | 1995-09-05 |
| 5019233 | Sputtering system | Julian G. Blake, Peter R. Younger | 1991-05-28 |
| 4952299 | Wafer handling apparatus | John M. Chrisos, Bertram F. Fowler, Jr. | 1990-08-28 |
| 4923584 | Sealing apparatus for a vacuum processing system | Robert B. Bramhall, Jr., Richard M. Cloutier, Albert P. Laber | 1990-05-08 |
| 4486652 | Blackbody radiation source with constant planar energy flux | Carl J. Russo | 1984-12-04 |
| 4481406 | Heater assembly for thermal processing of a semiconductor wafer in a vacuum chamber | — | 1984-11-06 |
| 4433246 | Blackbody radiation source for producing constant planar energy flux | Carl J. Russo | 1984-02-21 |
| 4421306 | Document feeder with improved vacuum system | — | 1983-12-20 |
| 4421479 | Process for treating a semiconductor material by blackbody radiation source with constant planar energy flux | Carl J. Russo | 1983-12-20 |
| 4417347 | Semiconductor processor incorporating blackbody radiation source with constant planar energy flux | Carl J. Russo | 1983-11-22 |