Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5882413 | Substrate processing apparatus having a substrate transport with a front end extension and an internal substrate buffer | David Beaulieu | 1999-03-16 |
| 5664925 | Batchloader for load lock | Richard S. Muka, Mitchell Drew | 1997-09-09 |
| 5613821 | Cluster tool batchloader of substrate carrier | Richard S. Muka, Mitchell Drew | 1997-03-25 |
| 5607276 | Batchloader for substrate carrier on load lock | Richard S. Muka, Mitchell Drew | 1997-03-04 |