Issued Patents All Time
Showing 26–50 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10978330 | On the fly automatic wafer centering method and apparatus | Bing Yin, Vincent W. Tsang, Aaron Gawlik, Nathan Spiker | 2021-04-13 |
| 10903107 | Semiconductor process transport apparatus comprising an adapter pendant | Dana L. Atwood | 2021-01-26 |
| 10843341 | Method and apparatus for health assessment of a transport apparatus | Aaron Gawlik | 2020-11-24 |
| 10770325 | Tool auto-teach method and apparatus | Aaron Gawlik, Reza Saeidpourazar | 2020-09-08 |
| 10742092 | Position feedback for sealed environments | Reza Saeidpourazar, Branden Gunn, Matthew W. Coady, Ulysses Gilchrist | 2020-08-11 |
| 10651067 | Method and apparatus for substrate transport apparatus position compensation | Robert T. Caveney, Bing Yin, Nathan Spiker, Vincent W. Tsang | 2020-05-12 |
| 10600665 | Substrate processing apparatus | Robert T. Caveney, Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew | 2020-03-24 |
| 10564221 | Method and apparatus for brushless electrical machine control | Nathan Spiker, Aaron Gawlik, Jayaraman Krishnasamy | 2020-02-18 |
| 10556351 | Transport apparatus | Ulysses Gilchrist | 2020-02-11 |
| 10488851 | Scalable motion control system | Martin Hosek, Stuart Beale, Roumen Botev, Matthew W. Coady, Christopher Hofmeister +2 more | 2019-11-26 |
| 10468936 | Sealed robot drive | Ulysses Gilchrist, Robert T. Caveney | 2019-11-05 |
| 10381252 | Tool auto-teach method and apparatus | Aaron Gawlik, Reza Saeidpourazar | 2019-08-13 |
| 10348172 | Sealed switched reluctance motor | Jayaraman Krishnasamy | 2019-07-09 |
| 10325795 | Substrate processing apparatus | Robert T. Caveney, Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew | 2019-06-18 |
| 10137576 | Transport apparatus | Ulysses Gilchrist | 2018-11-27 |
| 10134623 | On the fly automatic wafer centering method and apparatus | Bing Yin, Vincent W. Tsang, Aaron Gawlik, Nathan Spiker | 2018-11-20 |
| 10002781 | Tool auto-teach method and apparatus | Aaron Gawlik, Reza Saeidpourazar | 2018-06-19 |
| 9948155 | Sealed robot drive | Ulysses Gilchrist, Robert T. Caveney | 2018-04-17 |
| 9852935 | Substrate processing apparatus | Robert T. Caveney, Jayaraman Krishnasamy, Ulysses Gilchrist, Mitchell Drew | 2017-12-26 |
| 9752615 | Reduced-complexity self-bearing brushless DC motor | Martin Hosek, Christopher Hofmeister | 2017-09-05 |
| 9601362 | High speed substrate aligner apparatus | Martin Hosek, Todd Bottomley, Ulysses Gilchrist | 2017-03-21 |
| 9230841 | Substrate processing apparatus | Ulysses Gilchrist, Robert T. Caveney, Jayaraman Krishnasamy, Mitchell Drew | 2016-01-05 |
| 9024488 | Robot drive with magnetic spindle bearings | Ulysses Gilchrist, Martin Hosek, Jay Krishnasamy, Christopher Hofmeister | 2015-05-05 |
| 9020617 | Scalable motion control system | Martin Hosek, Stuart Beale, Roumen Botev, Matthew W. Coady, Christopher Hofmeister +2 more | 2015-04-28 |
| 8918203 | Substrate processing apparatus | Ulysses Gilchrist, Robert T. Caveney, Jayaraman Krishnasamy, Mitchell Drew | 2014-12-23 |