Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11215921 | Residual layer thickness compensation in nano-fabrication by modified drop pattern | Craig William Cone, Logan L. Simpson, Wei Zhang, James W. Irving | 2022-01-04 |
| 11161280 | Strain and kinetics control during separation phase of imprint process | Niyaz Khusnatdinov, Frank Y. Xu, Mario Johannes Meissl, Michael Nevin Miller, Gerard Schmid +3 more | 2021-11-02 |
| 11131922 | Imprint lithography template, system, and method of imprinting | Andrew Robert Eckert, Kosta S. Selinidis | 2021-09-28 |
| 8652393 | Strain and kinetics control during separation phase of imprint process | Niyaz Khusnatdinov, Frank Y. Xu, Mario Johannes Meissl, Michael Nevin Miller, Gerard Schmid +3 more | 2014-02-18 |
| 8012395 | Template having alignment marks formed of contrast material | Kosta S. Selinidis, Byung-Jin Choi, Gerard Schmid, Ian McMackin | 2011-09-06 |
| 7768624 | Method for obtaining force combinations for template deformation using nullspace and methods optimization techniques | Anshuman Cherala, Sidlgata V. Sreenivasan, Byung-Jin Choi | 2010-08-03 |
| 7122482 | Methods for fabricating patterned features utilizing imprint lithography | Frank Y. Xu, Nicholas Stacey, Michael Watts | 2006-10-17 |