Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8968620 | Safe separation for nano imprinting | Se-Hyuk Im, Mahadevan GanapathiSubramanian, Edward Brian Fletcher, Niyaz Khusnatdinov, Gerard Schmid +4 more | 2015-03-03 |
| 8033815 | Chucking system for nano-manufacturing | Daniel Babbs, Byung-Jin Choi | 2011-10-11 |
| 8033813 | Chucking system comprising an array of fluid chambers | Byung-Jin Choi, Pankaj Lad, Steven C. Shackleton | 2011-10-11 |
| 7798801 | Chucking system for nano-manufacturing | Daniel Babbs, Byung-Jin Choi | 2010-09-21 |
| 7768624 | Method for obtaining force combinations for template deformation using nullspace and methods optimization techniques | Sidlgata V. Sreenivasan, Byung-Jin Choi, Ecron D. Thompson | 2010-08-03 |
| 7636999 | Method of retaining a substrate to a wafer chuck | Byung-Jin Choi, Daniel Babbs | 2009-12-29 |
| 7635263 | Chucking system comprising an array of fluid chambers | Byung-Jin Choi, Pankaj Lad, Steven C. Shackleton | 2009-12-22 |
| 7635445 | Method of separating a mold from a solidified layer disposed on a substrate | Byung-Jin Choi, Yeong-Jun Choi, Mario Johannes Meissl, Sidlgata V. Sreenivasan, Norman E. Schumaker +3 more | 2009-12-22 |
| 7535549 | System and method for improvement of alignment and overlay for microlithography | Sidlgata V. Sreenivasan, Kranthimitra Adusumilli | 2009-05-19 |
| 7462028 | Partial vacuum environment imprinting | Pankaj Lad, Ian McMackin, Byung-Jin Choi | 2008-12-09 |
| 7420654 | Method of varying dimensions of a substrate during nano-scale manufacturing | Byung-Jin Choi, Pawan Kumar Nimmakayala, Mario Johannes Meissl, Sidlgata V. Sreenivasan | 2008-09-02 |
| 7323130 | Magnification correction employing out-of-plane distortion of a substrate | Pawan Kumar Nimmakayala, Sidlgata V. Sreenivasan, Byung-Jin Choi | 2008-01-29 |
| 7298456 | System for varying dimensions of a substrate during nanoscale manufacturing | Byung-Jin Choi, Pawan Kumar Nimmakayala, Mario Johannes Meissl, Sidlgata V. Sreenivasan | 2007-11-20 |
| 7261830 | Applying imprinting material to substrates employing electromagnetic fields | Sidlgata V. Sreenivasan, Norman E. Schumaker | 2007-08-28 |
| 7170589 | Apparatus to vary dimensions of a substrate during nano-scale manufacturing | Byung-Jin Choi, Pawan Kumar Nimmakayala, Mario Johannes Meissl, Sidlgata V. Sreenivasan | 2007-01-30 |