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Step and repeat imprint lithography process |
Sidlgata V. Sreenivasan, Byung-Jin Choi, Ronald D. Voisin, Michael Watts, Mario Johannes Meissl |
2012-11-27 |
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Step and repeat imprint lithography processes |
Sidlgata V. Sreenivasan, Byung-Jin Choi, Ronald D. Voisin, Michael Watts, Mario Johannes Meissl |
2011-05-17 |
| 7727453 |
Step and repeat imprint lithography processes |
Sidlgata V. Sreenivasan, Byung-Jin Choi, Ronald D. Voisin, Michael Watts, Mario Johannes Meissl |
2010-06-01 |
| 7635445 |
Method of separating a mold from a solidified layer disposed on a substrate |
Byung-Jin Choi, Anshuman Cherala, Yeong-Jun Choi, Mario Johannes Meissl, Sidlgata V. Sreenivasan +3 more |
2009-12-22 |
| 7261830 |
Applying imprinting material to substrates employing electromagnetic fields |
Anshuman Cherala, Sidlgata V. Sreenivasan |
2007-08-28 |
| 7224443 |
Imprint lithography substrate processing tool for modulating shapes of substrates |
Byung-Jin Choi, Ronald D. Voisin, Sidlgata V. Sreenivasan, Michael Watts, Daniel Babbs +2 more |
2007-05-29 |
| 7077992 |
Step and repeat imprint lithography processes |
Sidlgata V. Sreenivasan, Byung-Jin Choi, Ronald D. Voisin, Michael Watts, Mario Johannes Meissl |
2006-07-18 |
| 7070405 |
Alignment systems for imprint lithography |
Sidlgata V. Sreenivasan, Michael Watts, Byung-Jin Choi, Ronald D. Voisin |
2006-07-04 |
| 7019819 |
Chucking system for modulating shapes of substrates |
Byung-Jin Choi, Ronald D. Voisin, Sidlgata V. Sreenivasan, Michael Watts, Daniel Babbs +2 more |
2006-03-28 |
| 6982783 |
Chucking system for modulating shapes of substrates |
Byung-Jin Choi, Ronald D. Voisin, Sidlgata V. Sreenivasan, Michael Watts, Daniel Babbs +2 more |
2006-01-03 |
| 6980282 |
Method for modulating shapes of substrates |
Byung-Jin Choi, Ronald D. Voisin, Sidlgata V. Sreenivasan, Michael Watts, C. Grant Willson +1 more |
2005-12-27 |
| 6900881 |
Step and repeat imprint lithography systems |
Sidlgata V. Sreenivasan, Michael Watts, Byung-Jin Choi, Mario Johannes Meissl, Ronald D. Voisin |
2005-05-31 |
| 4969416 |
Gas treatment apparatus and method |
Richard A. Stall, Craig R. Nelson, Wilfried Wagner |
1990-11-13 |
| 4838983 |
Gas treatment apparatus and method |
Richard A. Stall, Craig R. Nelson, Wilfried Wagner |
1989-06-13 |
| 4772356 |
Gas treatment apparatus and method |
Richard A. Stall, Craig R. Nelson, Wilfried Wagner |
1988-09-20 |
| 4313125 |
Light emitting semiconductor devices |
Robert L. Hartman, Louis A. Koszi |
1982-01-26 |