Issued Patents All Time
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10420461 | Image generating apparatus, image generating method, and storage medium | — | 2019-09-24 |
| 9606460 | Lithography apparatus, and method of manufacturing article | Yuichi Iwasaki, Hideki Ina | 2017-03-28 |
| 9001387 | Drawing apparatus, data processing method, and method of manufacturing article that transform partially overlapping regions using different transformation rules | Masato Muraki, Hiromi Kinebuchi | 2015-04-07 |
| 8976337 | Method of measuring mark position and measuring apparatus | — | 2015-03-10 |
| 8532366 | Position detecting method | — | 2013-09-10 |
| 8097473 | Alignment method, exposure method, pattern forming method, and exposure apparatus | Hideki Ina | 2012-01-17 |
| 8089612 | Position detection apparatus, position detection method, exposure apparatus, and device fabrication method | Takahiro Matsumoto, Koichi Sentoku | 2012-01-03 |
| 7983472 | Position detecting method | — | 2011-07-19 |
| 7952725 | Surface shape measurement apparatus and exposure apparatus | Koichi Sentoku, Takahiro Matsumoto, Hideki Ina | 2011-05-31 |
| 7916271 | Apparatus and method for specifying correlation, exposure apparatus, and device manufacturing method | Hideki Ina | 2011-03-29 |
| 7865328 | Position detecting method and apparatus | Takehiko Suzuki | 2011-01-04 |
| 7710543 | Scanning exposure apparatus and device manufacturing method | — | 2010-05-04 |
| 7443493 | Transfer characteristic calculation apparatus, transfer characteristic calculation method, and exposure apparatus | Hideki Ina | 2008-10-28 |
| 7385700 | Management system, apparatus, and method, exposure apparatus, and control method therefor | Takahiro Matsumoto, Hideki Ina, Takehiko Suzuki, Koichi Sentoku | 2008-06-10 |
| 7373213 | Management system and apparatus, method therefor, and device manufacturing method | Hideki Ina, Takehiko Suzuki, Koichi Sentoku, Takahiro Matsumoto | 2008-05-13 |
| 7352891 | Position detecting method | Takehiko Suzuki | 2008-04-01 |
| 7313873 | Surface position measuring method, exposure apparatus, and device manufacturing method | Hideki Ina | 2008-01-01 |
| 7247868 | Position detection method and apparatus | Takehiko Suzuki, Hideki Ina, Koichi Sentoku | 2007-07-24 |
| 7173716 | Alignment apparatus, exposure apparatus using the same, and method of manufacturing devices | Hideki Ina, Takehiko Suzuki, Koichi Sentoku | 2007-02-06 |
| 7148973 | Position detecting method and apparatus, exposure apparatus and device manufacturing method | Koichi Sentoku, Hideki Ina, Takehiko Suzuki | 2006-12-12 |
| 7110116 | Alignment apparatus, exposure apparatus using same, and method of manufacturing devices | Hideki Ina, Takehiko Suzuki, Koichi Sentoku | 2006-09-19 |
| 7075618 | Apparatus control system, apparatus control method, semiconductor exposure apparatus, semiconductor exposure apparatus control method and semiconductor device manufacturing method | Hideki Ina, Takehiko Suzuki, Koichi Sentoku, Takahiro Matsumoto | 2006-07-11 |
| 7067826 | Position detection method and apparatus | Takehiko Suzuki, Hideki Ina, Koichi Sentoku | 2006-06-27 |
| 7069104 | Management system, management apparatus, management method, and device manufacturing method | Takehiko Suzuki, Hideki Ina, Koichi Sentoku, Takahiro Matsumoto | 2006-06-27 |
| 7035759 | Position detecting method and apparatus | Takehiko Suzuki | 2006-04-25 |