Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7010380 | Management system, management method and apparatus, and management apparatus control method | Koichi Sentoku, Hideki Ina, Takehiko Suzuki, Takahiro Matsumoto | 2006-03-07 |
| 6992767 | Management system, apparatus, and method, exposure apparatus, and control method therefor | Takahiro Matsumoto, Hideki Ina, Takehiko Suzuki, Koichi Sentoku | 2006-01-31 |
| 6992780 | Position detecting method and apparatus, exposure apparatus and device manufacturing method | Koichi Sentoku, Hideki Ina, Takehiko Suzuki | 2006-01-31 |
| 6914666 | Method and system for optimizing parameter value in exposure apparatus and exposure apparatus and method | — | 2005-07-05 |
| 6785583 | Management system and apparatus, method therefor, and device manufacturing method | Hideki Ina, Takehiko Suzuki, Koichi Sentoku, Takahiro Matsumoto | 2004-08-31 |
| 6412978 | X-ray diagnostic apparatus | Naoto Watanabe | 2002-07-02 |
| 6196715 | X-ray diagnostic system preferable to two dimensional x-ray detection | Kyojiro Nambu, Katsuyuki Taguchi | 2001-03-06 |
| 5910843 | Positioning apparatus and method thereof, and exposure apparatus | — | 1999-06-08 |