| 9739675 |
Surface acoustic wave sensor |
Akihiko Teshigahara, Toshihiko TAKAHATA, Takao Iwaki, Shuji Tanaka, Kenya Hashimoto |
2017-08-22 |
|
| 9478503 |
Integrated device |
Mitsutoshi Makihata, Shuji Tanaka, Masanori Muroyama, Hirofumi Funabashi, Yutaka Nonomura +4 more |
2016-10-25 |
|
| 9215089 |
Touch sensor system |
Masanori Muroyama, Shuji Tanaka, Sakae Matsuzaki, Mitsutoshi Makihata, Yutaka Nonomura +4 more |
2015-12-15 |
|
| 9134189 |
Dynamic quantity sensor and dynamic quantity sensor system |
Yoshiyuki Hata, Yutaka Nonomura, Motohiro Fujiyoshi, Hirofumi Funabashi, Teruhisa Akashi +7 more |
2015-09-15 |
$848,000 |
| 8823114 |
Sensor device having electrode draw-out portions through side of substrate |
Shuji Tanaka, Masanori Muroyama, Sakae Matsuzaki, Mitsutoshi Makihata, Yutaka Nonomura +4 more |
2014-09-02 |
$954,000 |
| 8796850 |
Wiring connection method and functional device |
Shuji Tanaka, Sakae Matsuzaki, Mamoru Mori |
2014-08-05 |
|
| 8613231 |
Sheet-like tactile sensor system |
Masanori Muroyama, Shuji Tanaka, Sakae Matsuzaki, Mitsutoshi Makihata, Yutaka Nonomura +4 more |
2013-12-24 |
$3,505,000 |
| 8481248 |
Method for fabricating micromachine component of resin |
Nao Honda, Satoshi Mori, Shuji Tanaka |
2013-07-09 |
|
| 8336399 |
Sensor system |
Masanori Muroyama, Shuji Tanaka, Sakae Matsuzaki, Mitsutoshi Makihata, Yutaka Nonomura +4 more |
2012-12-25 |
|
| 7723896 |
Driving mechanism using shape memory alloys including a magnetic latch |
Yoichi Haga, Masanori Mizushima, Tadao Matsunaga |
2010-05-25 |
|
| 7560081 |
Reactor and production thereof, reformer, and power supply system including paired channels having a heat exchanger formed thereon |
Yuichi Takai, Shuji Tanaka |
2009-07-14 |
$832,000 |
| 7466065 |
Bimorph switch, bimorph switch manufacturing method, electronic circuitry and electronic circuitry manufacturing method |
Hirokazu Sanpei, Jun Mizuno, Masazumi Yasuoka, Humikazu Takayanagi, Takehisa Takoshima +1 more |
2008-12-16 |
$69,000 |
| 7405506 |
Driving mechanism and micro-mirror device provided with the same |
Naoki Kikuchi, Rogerio Jun Mizuno, Masanori Maeda, Satoshi Karasawa |
2008-07-29 |
|
| 7372620 |
Micromirror and micromirror device |
Naoki Kikuchi |
2008-05-13 |
$165,000 |
| 7276707 |
Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus |
Yuichi Iwasaki, Masato Muraki, Kenji Tamamori, Kouji Asano, Yoshinori Nakayama +2 more |
2007-10-02 |
|
| 7271946 |
Micromirror and micromirror device |
Naoki Kikuchi |
2007-09-18 |
$160,000 |
| 7236283 |
Scanning mirror unit and beam scanning probe |
Naoki Kikuchi, Yoichi Haga, Masanori Maeda |
2007-06-26 |
$246,000 |
| 7223329 |
Active slender tubes and method of making the same |
Yoichi Haga |
2007-05-29 |
|
| 7177519 |
Functional multilayer film and method for manufacturing the same |
Yoshihiro Someno, Munemitsu Abe |
2007-02-13 |
$1,013,000 |
| 7170216 |
Bimorph switch, bimorph switch manufacturing method, electronic circuitry and electronic circuitry manufacturing method |
Hirokazu Sanpei, Jun Mizuno, Masazumi Yasuoka, Humikazu Takayanagi, Takehisa Takoshima +1 more |
2007-01-30 |
$24,000 |
| 6953938 |
Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus |
Yuichi Iwasaki, Masato Muraki, Kenji Tamamori, Kouji Asano, Yoshinori Nakayama +2 more |
2005-10-11 |
|
| 6938489 |
Oscillatory type pressure sensor |
Kaoru Hirata |
2005-09-06 |
|
| 6936015 |
Active guide wire and method of making the same |
Yoichi Haga, Takashi Mineta |
2005-08-30 |
|
| 6935181 |
Anticorrosive vacuum sensor |
Haruzo Miyashita, Yasuyuki Kitamura |
2005-08-30 |
|
| 6903637 |
Connecting member, a micro-switch, a method for manufacturing a connecting member, and a method for manufacturing a micro-switch |
Masaru Miyazaki, Hirokazu Sampei, Yongxun Liu |
2005-06-07 |
$46,000 |
