| 12349279 |
Electronic device |
Keitaro ITO, Hideki Terasawa, Suguru Houchi, Naoki Yoshida |
2025-07-01 |
| 12269733 |
Inertial sensor and method for manufacturing the same |
Keitaro ITO, Shota HARADA, Katsuaki Goto, Yuuki Inagaki, Hirofumi Funabashi +2 more |
2025-04-08 |
| 12185467 |
Electronic device |
Keitaro ITO, Hirofumi Funabashi |
2024-12-31 |
| 12104904 |
Support structure for micro-vibrator and method of manufacturing inertial sensor |
Hirofumi Funabashi, Yuuki Inagaki |
2024-10-01 |
| 12078487 |
Method for manufacturing multi-axial inertial force sensor |
Shota HARADA |
2024-09-03 |
| 12017401 |
Molding device |
Norio Fujitsuka, Keiichi Shimaoka, Shota HARADA, Yuuki Inagaki, Katsuaki Goto +2 more |
2024-06-25 |
| 11915924 |
Semiconductor device and method for manufacturing the same |
Megumi Suzuki, Yasuo Yamamoto |
2024-02-27 |
| 11852482 |
Angular velocity sensor and angular velocity sensor system |
Katsuaki Goto, Shota HARADA, Takashi Katsumata, Yoshiyuki Hata |
2023-12-26 |
| 11846651 |
Electrostatic actuator and physical quantity sensor |
Shota HARADA, Keitaro ITO, Tomoya Jomori, Hideo Yamada, Yuuki Inagaki +1 more |
2023-12-19 |
| 11740087 |
Inertial sensor |
Shota HARADA, Keitaro ITO, Katsuaki Goto, Yuuki Inagaki, Takahiko Yoshida +2 more |
2023-08-29 |
| 11027968 |
Semiconductor device with discharge path, and method for producing the same |
Megumi Suzuki |
2021-06-08 |
| 10840519 |
Fuel cell system |
Hirofumi Funabashi, Hidehito Matsuo |
2020-11-17 |
| 10727494 |
Fuel cell |
Hirofumi Funabashi, Hiroko Iguchi, Hidehito Matsuo, Shigeo Hori |
2020-07-28 |
| 10727517 |
Solid oxide fuel cell |
Hidehito Matsuo, Hirofumi Funabashi, Hiroko Iguchi, Shigeo Hori, Toshihiko Tani |
2020-07-28 |
| 10637078 |
Fuel cell |
Hirofumi Funabashi, Hiroko Iguchi, Hidehito Matsuo, Shigeo Hori |
2020-04-28 |
| 10435808 |
Etching apparatus used for photo electrochemical etching of semiconductor substrate |
Eiko Ishii, Yumi Saito, Kenji Nakashima |
2019-10-08 |
| 10114212 |
Deflector |
Isao Aoyagi, Kanae Murata, Takashi Ozaki, Norio Fujitsuka, Yutaka Nonomura |
2018-10-30 |
| 9536996 |
Apparatus and method of manufacturing a support layer |
Hirofumi Funabashi, Takashi Ozaki, Isao Aoyagi, Yoshiteru Omura, Keiichi Shimaoka +7 more |
2017-01-03 |
| 9477078 |
MEMS device |
Kanae Murata, Isao Aoyagi, Yutaka Nonomura |
2016-10-25 |
| 9134189 |
Dynamic quantity sensor and dynamic quantity sensor system |
Yoshiyuki Hata, Yutaka Nonomura, Motohiro Fujiyoshi, Hirofumi Funabashi, Yoshiteru Omura +7 more |
2015-09-15 |
| 8816451 |
MEMS structure and manufacturing method thereof |
Hirofumi Funabashi, Yutaka Nonomura, Yoshiyuki Hata, Motohiro Fujiyoshi, Yoshiteru Omura |
2014-08-26 |
| 8707784 |
Laminated structure provided with movable portion |
Yutaka Nonomura, Motohiro Fujiyoshi, Hirofumi Funabashi, Yoshiyuki Hata, Yoshiteru Omura |
2014-04-29 |
| 8698315 |
Semiconductor device |
Yoshiyuki Hata, Yutaka Nonomura, Hirofumi Funabashi, Motohiro Fujiyoshi, Yoshiteru Omura |
2014-04-15 |
| 8368196 |
Micro device having a movable structure |
Hirofumi Funabashi, Motohiro Fujiyoshi, Yutaka Nonomura |
2013-02-05 |
| 8365597 |
Apparatus having a movable body |
Yutaka Nonomura, Motohiro Fujiyoshi, Hirofumi Funabashi |
2013-02-05 |