Issued Patents All Time
Showing 26–50 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6820487 | Reflective moveable diaphragm unit and pressure sensor containing same | Yoichi Haga, Takashi Katsumata | 2004-11-23 |
| 6818911 | Array structure and method of manufacturing the same, charged particle beam exposure apparatus, and device manufacturing method | Kenji Tamamori, Masato Muraki, Yuichi Iwasaki, Yoshinori Nakayama, Kouji Asano +1 more | 2004-11-16 |
| 6756248 | Pressure transducer and manufacturing method thereof | Masaharu Ikeda | 2004-06-29 |
| 6747465 | Contractor, method for manufacturing the same, and probe card using the same | Shinji Iino, Tomohisa Hoshino | 2004-06-08 |
| 6679118 | Accelerometer and spherical sensor type measuring instrument | Takao Murakoshi, Shigeru Nakamura, Nobuo Takeda | 2004-01-20 |
| 6672338 | Active slender tubes and method of making the same | Yoichi Haga | 2004-01-06 |
| 6598483 | Capacitive vacuum sensor | Haruzo Miyashita | 2003-07-29 |
| 6584843 | Gyroscope and input unit using the same | Munemitsu Abe | 2003-07-01 |
| 6566265 | Method of working piezoelectric substance and method of manufacturing composite piezoelectric substance | Takashi Abe, Katsuhiro Wakabayashi | 2003-05-20 |
| 6536281 | Capacitive micro sensor, gyroscope, and input device | Munemitsu Abe, Eiji Shinohara | 2003-03-25 |
| 6524878 | Microactuator, method for making the same, and magnetic head unit and magnetic recording apparatus using the same | Munemitsu Abe | 2003-02-25 |
| 6505409 | Inclinometer | Risaku Toda | 2003-01-14 |
| 6497148 | Gyroscope and input apparatus using the same | Munemitsu Abe, Eiji Shinohara | 2002-12-24 |
| 6450618 | Ink jet head and method of producing the same | Seiichi Kato, Yukito Sato | 2002-09-17 |
| 6439052 | Gyroscope and input apparatus using the gyroscope that detects displacement of leg of tuning fork by means of capacitance change when angular velocity is entered | Munemitsu Abe, Shinji Murata | 2002-08-27 |
| 6441451 | Pressure transducer and manufacturing method thereof | Masaharu Ikeda | 2002-08-27 |
| 6425418 | Flexible tube and manufacturing method for the same | Shigeo Maeda, Yoichi Haga | 2002-07-30 |
| 6424504 | Microactuator, magnetic head device, and magnetic recording apparatus | Munemitsu Abe | 2002-07-23 |
| 6278224 | Ultrasonic transducer and method for manufacturing the same | Yukihiko Sawada, Tomoki Funakubo, Katsuhiro Wakabayashi, Shinan Wang | 2001-08-21 |
| 6230564 | Semiconductor acceleration sensor and its self-diagnosing method | Tadao Matsunaga, Takashi Kunimi, Masahiro Nezu, Masatomo Mori | 2001-05-15 |
| 6153917 | Semiconductor acceleration sensor and manufacturing method thereof | Tadao Matsunaga, Takashi Kunimi, Masahiro Nezu, Masatomo Mori | 2000-11-28 |
| 6145384 | Capacitive transducer having guard electrode and buffer amlifying means | Masaharu Ikeda | 2000-11-14 |
| 5952572 | Angular rate sensor and acceleration sensor | Mitsuhiro Yamashita | 1999-09-14 |
| 5872496 | Planar type electromagnetic relay and method of manufacturing thereof | Norihiro Asada | 1999-02-16 |
| 5767666 | Planar type mirror galvanometer incorpotating a displacement detection function | Norihiro Asada | 1998-06-16 |