Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11543755 | Method of manufacturing semiconductor device | Takehiro Toyoda, Hiroaki Kobayashi, Hideki Ina, Kosuke Asano | 2023-01-03 |
| 11474439 | Exposure apparatus, exposure method, and method of manufacturing article | Ryo Koizumi, Jun Moizumi, Koji Mikami | 2022-10-18 |