Issued Patents All Time
Showing 26–50 of 114 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8097473 | Alignment method, exposure method, pattern forming method, and exposure apparatus | Satoru Oishi | 2012-01-17 |
| 8047828 | Imprint apparatus, imprint method, and mold for imprint | Nobuhito Suehira, Junichi Seki | 2011-11-01 |
| 7981304 | Process for producing a chip using a mold | Atsunori Terasaki, Junichi Seki, Nobuhito Suehira, Shingo Okushima | 2011-07-19 |
| 7952725 | Surface shape measurement apparatus and exposure apparatus | Koichi Sentoku, Takahiro Matsumoto, Satoru Oishi | 2011-05-31 |
| 7924426 | Information processing apparatus for interference signal processing | Tomoyuki Miyashita, Takahiro Matsumoto | 2011-04-12 |
| 7916271 | Apparatus and method for specifying correlation, exposure apparatus, and device manufacturing method | Satoru Oishi | 2011-03-29 |
| 7884935 | Pattern transfer apparatus, imprint apparatus, and pattern transfer method | Nobuhito Suehira, Junichi Seki, Koichi Sentoku | 2011-02-08 |
| 7794222 | Mold, pattern forming method, and pattern forming apparatus | Nobuhito Suehira, Junichi Seki, Masao Majima, Atsunori Terasaki | 2010-09-14 |
| 7771905 | Method and program for calculating exposure dose and focus position in exposure apparatus, and device manufacturing method | Koichi Sentoku, Koji Mikami, Yoshiaki Sugimura, Hiroto Yoshii, Tomoyuki Miyashita | 2010-08-10 |
| 7670729 | Measurement method and apparatus, exposure apparatus, and device fabrication method | Atsushi Takagi, Koichi Sentoku, Hiroshi Morohoshi | 2010-03-02 |
| 7643961 | Position detecting device and position detecting method | Takahiro Matsumoto | 2010-01-05 |
| 7586582 | Exposure apparatus | Koichi Sentoku, Gaku Takahashi, Yoshinori Miwa | 2009-09-08 |
| 7531821 | Imprint apparatus and imprint method including dual movable image pick-up device | Nobuhito Suehira, Junichi Seki, Koichi Sentoku | 2009-05-12 |
| 7510388 | Mold, imprint method, and process for producing chip | Atsunori Terasaki, Junichi Seki, Nobuhito Suehira, Shingo Okushima | 2009-03-31 |
| 7497111 | Surface shape measuring apparatus, surface measuring method, and exposure apparatus | — | 2009-03-03 |
| 7443493 | Transfer characteristic calculation apparatus, transfer characteristic calculation method, and exposure apparatus | Satoru Oishi | 2008-10-28 |
| 7435984 | Imaging optical system and exposure apparatus | Koichi Sentoku, Gaku Takahashi, Yoshinori Miwa | 2008-10-14 |
| 7385700 | Management system, apparatus, and method, exposure apparatus, and control method therefor | Takahiro Matsumoto, Takehiko Suzuki, Koichi Sentoku, Satoru Oishi | 2008-06-10 |
| 7373213 | Management system and apparatus, method therefor, and device manufacturing method | Satoru Oishi, Takehiko Suzuki, Koichi Sentoku, Takahiro Matsumoto | 2008-05-13 |
| 7313873 | Surface position measuring method, exposure apparatus, and device manufacturing method | Satoru Oishi | 2008-01-01 |
| 7271882 | Shape measuring apparatus, shape measuring method, and aligning method | Koichi Sentoku, Takahiro Matsumoto | 2007-09-18 |
| 7247868 | Position detection method and apparatus | Takehiko Suzuki, Koichi Sentoku, Satoru Oishi | 2007-07-24 |
| 7229566 | Position detecting method and apparatus | Takahiro Matsumoto | 2007-06-12 |
| 7225041 | Information providing method and system | Ichiro Kano, Kaoru Mizushiri, Masahiro Ohtake, Shinji Utamura, Nobuaki Ogushi +2 more | 2007-05-29 |
| 7173716 | Alignment apparatus, exposure apparatus using the same, and method of manufacturing devices | Satoru Oishi, Takehiko Suzuki, Koichi Sentoku | 2007-02-06 |