Issued Patents All Time
Showing 76–100 of 114 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6636311 | Alignment method and exposure apparatus using the same | Minoru Yoshii, Masanobu Hasegawa, Takashi Satoh | 2003-10-21 |
| 6563573 | Method of evaluating imaging performance | Hiroshi Morohoshi | 2003-05-13 |
| 6559924 | Alignment method, alignment apparatus, profiler, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory | Koichi Sentoku, Takahiro Matsumoto | 2003-05-06 |
| 6552798 | Position detecting method and system for use in exposure apparatus | Takehiko Suzuki, Atsushi Kitaoka | 2003-04-22 |
| 6529625 | Position detecting method and position detecting device for detecting relative positions of objects having position detecting marks by using separate reference member having alignment marks | Koichi Sentoku | 2003-03-04 |
| 6521889 | Dust particle inspection apparatus, and device manufacturing method using the same | Kenji Itoga | 2003-02-18 |
| 6493065 | Alignment system and alignment method in exposure apparatus | Seiji Miyata | 2002-12-10 |
| 6453000 | Exposure method, exposure device and semiconductor device manufacturing method | Shigeru Terashima | 2002-09-17 |
| 6300020 | Ball-shaped device exposure apparatus and ball-shaped device manufacturing method | Setsuo Minami | 2001-10-09 |
| 6266130 | Position detecting method and position detecting system | Masanobu Hasegawa | 2001-07-24 |
| 6151120 | Exposure apparatus and method | Takahiro Matsumoto | 2000-11-21 |
| 6097472 | Apparatus and method for exposing a pattern on a ball-like device material | Nobuyoshi Tanaka, Kenji Saito, Yoshiyuki Sekine | 2000-08-01 |
| 6080512 | Semiconductor exposure method and apparatus, and a reticle therefor | — | 2000-06-27 |
| 5808724 | Illumination method and system having a first optical element at a position optically conjugate with an object and a second optical element closer to the object and on a pupil plane of the system | Tsuneo Kanda | 1998-09-15 |
| 5790258 | Position detecting device | Noriyuki Mitome | 1998-08-04 |
| 5659384 | Position detection apparatus and method | — | 1997-08-19 |
| 5323207 | Projection exposure apparatus | — | 1994-06-21 |
| 5309197 | Projection exposure apparatus | Tetsuya Mori, Akiyoshi Suzuki | 1994-05-03 |
| 5160957 | Alignment and exposure apparatus | Masao Kosugi, Akiyoshi Suzuki | 1992-11-03 |
| 5148214 | Alignment and exposure apparatus | Masakatsu Ohta, Akiyoshi Suzuki | 1992-09-15 |
| 5137363 | Projection exposure apparatus | Masao Kosugi, Akiyoshi Suzuki, Hitoshi Fukuda | 1992-08-11 |
| 5133603 | Device for observing alignment marks on a mask and wafer | Akiyoshi Suzuki | 1992-07-28 |
| 5048967 | Detection optical system for detecting a pattern on an object | Akiyoshi Suzuki | 1991-09-17 |
| 4952060 | Alignment method and a projection exposure apparatus using the same | Fumio Sakai, Hitoshi Nakano | 1990-08-28 |
| 4937459 | Alignment signal detecting device | — | 1990-06-26 |