Issued Patents All Time
Showing 101–114 of 114 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4901109 | Alignment and exposure apparatus | Noriyuki Mitome | 1990-02-13 |
| 4888614 | Observation system for a projection exposure apparatus | Akiyoshi Suzuki, Masao Kosugi | 1989-12-19 |
| 4886974 | Mark detecting device for detecting the center of a mark by detecting its edges | — | 1989-12-12 |
| 4883359 | Alignment method and pattern forming method using the same | Akiyoshi Suzuki | 1989-11-28 |
| 4861162 | Alignment of an object | — | 1989-08-29 |
| 4834540 | Projection exposure apparatus | Masao Totsuka, Akiyoshi Suzuki | 1989-05-30 |
| 4830499 | Optical device capable of maintaining pupil imaging | Michio Kohno, Akiyoshi Suzuki | 1989-05-16 |
| 4814829 | Projection exposure apparatus | Masao Kosugi, Akiyoshi Suzuki, Kazuhito Outsuka, Shigeki Ogawa, Masao Totsuka +1 more | 1989-03-21 |
| 4669883 | Method and apparatus for alignment | Hiroshi Shinkai | 1987-06-02 |
| 4669885 | Apparatus for inspecting negatives | — | 1987-06-02 |
| 4645924 | Observation apparatus with selective light diffusion | Akiyoshi Suzuki | 1987-02-24 |
| 4641035 | Apparatus and a method for position detection of an object stepped portion | Akiyoshi Suzuki | 1987-02-03 |
| 4634240 | Optical apparatus using polarized light | Akiyoshi Suzuki | 1987-01-06 |
| 4621890 | Optical apparatus including two afocal systems | Akiyoshi Suzuki, Kazuo Takahashi | 1986-11-11 |