Issued Patents All Time
Showing 51–75 of 114 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7148973 | Position detecting method and apparatus, exposure apparatus and device manufacturing method | Koichi Sentoku, Takehiko Suzuki, Satoru Oishi | 2006-12-12 |
| 7123414 | Method for producing library | Koichi Sentoku | 2006-10-17 |
| 7110116 | Alignment apparatus, exposure apparatus using same, and method of manufacturing devices | Satoru Oishi, Takehiko Suzuki, Koichi Sentoku | 2006-09-19 |
| 7106419 | Exposure method and apparatus | — | 2006-09-12 |
| 7103497 | Position detecting device and position detecting method | Takahiro Matsumoto | 2006-09-05 |
| 7081038 | Polishing method and apparatus | — | 2006-07-25 |
| 7075618 | Apparatus control system, apparatus control method, semiconductor exposure apparatus, semiconductor exposure apparatus control method and semiconductor device manufacturing method | Takehiko Suzuki, Koichi Sentoku, Takahiro Matsumoto, Satoru Oishi | 2006-07-11 |
| 7069104 | Management system, management apparatus, management method, and device manufacturing method | Takehiko Suzuki, Koichi Sentoku, Takahiro Matsumoto, Satoru Oishi | 2006-06-27 |
| 7067826 | Position detection method and apparatus | Takehiko Suzuki, Koichi Sentoku, Satoru Oishi | 2006-06-27 |
| 7010380 | Management system, management method and apparatus, and management apparatus control method | Koichi Sentoku, Takehiko Suzuki, Takahiro Matsumoto, Satoru Oishi | 2006-03-07 |
| 6999893 | Position detecting device and position detecting method | Takahiro Matsumoto | 2006-02-14 |
| 6992767 | Management system, apparatus, and method, exposure apparatus, and control method therefor | Takahiro Matsumoto, Takehiko Suzuki, Koichi Sentoku, Satoru Oishi | 2006-01-31 |
| 6992780 | Position detecting method and apparatus, exposure apparatus and device manufacturing method | Koichi Sentoku, Takehiko Suzuki, Satoru Oishi | 2006-01-31 |
| 6980872 | Information providing method and system | Ichiro Kano, Kaoru Mizushiri, Masahiro Ohtake, Shinji Utamura, Nobuaki Ogushi +2 more | 2005-12-27 |
| 6975384 | Exposure apparatus and method | — | 2005-12-13 |
| 6972847 | Position detecting system and exposure apparatus using the same | Minoru Yoshii, Masanobu Hasegawa, Takashi Satoh | 2005-12-06 |
| 6965435 | Interferometer system for measuring surface shape | — | 2005-11-15 |
| 6957112 | Industrial machine management system and method | Nobuaki Ogushi, Masaya Ogura | 2005-10-18 |
| 6950179 | Shape measuring apparatus, shape measuring method, and aligning method | Koichi Sentoku, Takahiro Matsumoto | 2005-09-27 |
| 6940586 | Exposure apparatus and method | — | 2005-09-06 |
| 6906805 | Position detecting system and exposure apparatus using the same | Minoru Yoshii, Masanobu Hasegawa, Takashi Satoh | 2005-06-14 |
| 6785583 | Management system and apparatus, method therefor, and device manufacturing method | Satoru Oishi, Takehiko Suzuki, Koichi Sentoku, Takahiro Matsumoto | 2004-08-31 |
| 6770408 | Dust particle inspection method for X-ray mask | Kenji Itoga | 2004-08-03 |
| 6639677 | Position measuring method and position measuring system using the same | Hiroshi Morohoshi | 2003-10-28 |
| 6636303 | Foreign substance inspecting method and apparatus, which detect a height of a foreign substance, and an exposure apparatus using this inspecting apparatus | Koichi Sentoku, Takahiro Matsumoto | 2003-10-21 |