Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11370986 | Sliding material composition, sliding molded article, and sliding member | — | 2022-06-28 |
| 8411253 | Computer readable medium and exposure method | Kenji Yamazoe | 2013-04-02 |
| 8027025 | Exposure apparatus and device manufacturing method | — | 2011-09-27 |
| 7511888 | Projection optical system, exposure apparatus, device manufacturing method, and device manufactured by using the same | — | 2009-03-31 |
| 7430036 | Maskless exposure apparatus using optical modulator, and method for monitoring pattern generating performance by the optical modulator | — | 2008-09-30 |
| 7106455 | Interferometer and interferance measurement method | Akiyoshi Suzuki | 2006-09-12 |
| 6731431 | Optical unit having plural optical elements | — | 2004-05-04 |
| 6600606 | Projection optical system with diffractive optical element | — | 2003-07-29 |
| 6441886 | Illumination optical system and exposure apparatus having the same | Akiyoshi Suzuki | 2002-08-27 |
| 6417940 | Phase type computer hologram and optical instrument | — | 2002-07-09 |
| 6307618 | Projection exposure apparatus and device manufacturing method including a projection optical system having a pair of diffractive members | Akiyoshi Suzuki | 2001-10-23 |
| 6266192 | Projection exposure apparatus and device manufacturing method | Ryusho Hirose | 2001-07-24 |
| 6097472 | Apparatus and method for exposing a pattern on a ball-like device material | Nobuyoshi Tanaka, Kenji Saito, Hideki Ina | 2000-08-01 |
| 5585851 | Video signal transmission apparatus and video system for transmitting video signals with lower bit rate | Norio Ebihara, Noboru Asamizuya, Yasumasa Kodama | 1996-12-17 |
| 5414465 | Luminance signal generator with interpolation | Yasumasa Kodama | 1995-05-09 |