Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8810772 | Position detector, position detection method, exposure apparatus, and method of manufacturing device to align wafer by adjusting optical member | — | 2014-08-19 |
| 8674144 | Catalyst for asymmetric hydrogenation and method for manufacturing optically active carbonyl compound using the same | Shinya Yamada, Yoji Hori | 2014-03-18 |
| 8550711 | Treatment table system | Hiroshi Otani | 2013-10-08 |
| 8394320 | Method of preserving biomaterial | Shiro Sasaguri, Munetoshi Kawamura | 2013-03-12 |
| 8345220 | Aberration measurement method, exposure apparatus, and device manufacturing method | — | 2013-01-01 |
| 8345221 | Aberration measurement method, exposure apparatus, and device manufacturing method | — | 2013-01-01 |
| 8217204 | Catalyst for asymmetric hydrogenation | Yoji Hori | 2012-07-10 |
| 8185339 | Test method and program product used therefor | — | 2012-05-22 |
| 8049891 | Adjustment method for position detection apparatus, exposure apparatus, and device fabrication method | — | 2011-11-01 |
| 7888513 | Condensation reaction by metal catalyst | Kazushi Mashima, Takashi Ohshima, Takanori Iwasaki, Kenya Ishida | 2011-02-15 |
| 7580116 | Exposure apparatus and device fabrication method | — | 2009-08-25 |
| 6725449 | Semiconductor test program debugging apparatus | Yoshinori Maeda, Tadashi Oda | 2004-04-20 |