Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8223315 | Measuring apparatus and exposure apparatus having the same | — | 2012-07-17 |
| 7956987 | Measurement apparatus, exposure apparatus, and device manufacturing method | — | 2011-06-07 |
| 7688424 | Measurement apparatus, exposure apparatus, and device fabrication method | Seiji Takeuchi | 2010-03-30 |
| 7675629 | Exposure apparatus and device manufacturing method using a common path interferometer to form an interference pattern and a processor to calculate optical characteristics of projection optics using the interference pattern | Yasuhiro Sawada, Kenji Yamazoe, Seiji Takeuchi | 2010-03-09 |
| 7538854 | Measuring apparatus and exposure apparatus having the same | — | 2009-05-26 |
| 7508493 | Exposure apparatus and device manufacturing method | Seiji Takeuchi, Kenji Yamazoe, Minoru Yoshii | 2009-03-24 |
| 7466395 | Exposure apparatus and device manufacturing method using the apparatus | Akiyoshi Suzuki, Seiji Takeuchi | 2008-12-16 |
| 7158144 | Image processing apparatus and method for converting data dependent on a first illuminating light into data dependent on a second illuminating light | Yoshinobu Shiraiwa, Toshiyuki Mizuno | 2007-01-02 |
| 6975385 | Projection optical system and exposure apparatus | Toshihiro Sunaga, Koshi Hatakeyama, Takahiro Sasaki | 2005-12-13 |
| 6842255 | Interferometer and interferance measurement method | Akiyoshi Suzuki, Kenji Saitoh | 2005-01-11 |
| 6709794 | Exposure method based on multiple exposure process | — | 2004-03-23 |
| 6620556 | Mask for multiple exposure | — | 2003-09-16 |
| 6586168 | Exposure method based on multiple exposure process | — | 2003-07-01 |
| 6351304 | Multiple exposure method | Miyoko Kawashima | 2002-02-26 |