Issued Patents All Time
Showing 26–50 of 115 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6935417 | Solution heat exchanger for absorption refrigerating machine | Naoyuki Inoue, Toshio Matsubara, Shouji Tanaka, Hiroki Nakamura, Tomoyuki Uchimura | 2005-08-30 |
| 6842255 | Interferometer and interferance measurement method | Yumiko Ohsaki, Kenji Saitoh | 2005-01-11 |
| 6762823 | Illumination system and scanning exposure apparatus using the same | — | 2004-07-13 |
| 6753943 | Scanning exposure apparatus and device manufacturing method using the same | Toshihiko Tsuji | 2004-06-22 |
| 6714302 | Aligning method, aligner, and device manufacturing method | Minoru Yoshii | 2004-03-30 |
| 6681844 | Plate type heat exchanger | Naoyuki Inoue, Toshio Matsubara, Tomoyoshi Irie, Tomoyuki Uchimura | 2004-01-27 |
| 6654101 | EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD INCLUDING CHANGING A PHOTO-INTENSITY DISTRIBUTION OF A LIGHT SOURCE AND ADJUSTING AN ILLUMINANCE DISTRIBUTION ON A SUBSTRATE IN ACCORDANCE WITH THE CHANGE | Miyoko Kawashima | 2003-11-25 |
| 6564572 | Absorption refrigerator | Tomoyuki Uchimura, Toshio Matsubara, Tomoyoshi Irie | 2003-05-20 |
| 6534242 | Multiple exposure device formation | Mitsuro Sugita, Miyoko Kawashima, Kenji Saitoh, Yuichi Iwasaki | 2003-03-18 |
| 6473160 | Projection exposure apparatus and device manufacturing method including an aperture member having a circular light transmitting portion and a light blocking member | Miyoko Noguchi | 2002-10-29 |
| 6441886 | Illumination optical system and exposure apparatus having the same | Yoshiyuki Sekine | 2002-08-27 |
| 6403291 | Multiple exposure method | Miyoko Kawashima, Kenji Saitoh | 2002-06-11 |
| 6377337 | Projection exposure apparatus | Mitsuro Sugita | 2002-04-23 |
| 6344892 | Exposure apparatus and device manufacturing method using same | Mitsuro Sugita, Takahiro Matsumoto | 2002-02-05 |
| 6307618 | Projection exposure apparatus and device manufacturing method including a projection optical system having a pair of diffractive members | Yoshiyuki Sekine | 2001-10-23 |
| 6271909 | Exposure apparatus and device manufacturing method including changing a photo-intensity distribution of a light source and adjusting an illuminance distribution on a substrate in accordance with the change | Miyoko Noguchi | 2001-08-07 |
| 6172740 | Projection exposure apparatus and device manufacturing method | — | 2001-01-09 |
| 6128068 | Projection exposure apparatus including an illumination optical system that forms a secondary light source with a particular intensity distribution | Miyoko Noguchi | 2000-10-03 |
| 6107007 | Lithography process | Tadahiro Ohmi, Hisayuki Shimada, Shigeki Shimomura, Mamoru Miyawaki, Miyoko Noguchi | 2000-08-22 |
| 6104472 | Projection exposure apparatus and device manufacturing method | — | 2000-08-15 |
| 6084655 | Imaging method for manufacture of microdevices | Miyoko Noguchi | 2000-07-04 |
| 5905569 | Illuminance measuring method, an exposure apparatus using the method, and a device manufacturing method | — | 1999-05-18 |
| D406253 | Engine power assisted bicycle | Izumi Yamashita | 1999-03-02 |
| 5789734 | Exposure apparatus that compensates for spherical aberration of an image forming device | Makoto Torigoe | 1998-08-04 |
| 5754061 | Bi-CMOS circuits with enhanced power supply noise suppression and enhanced speed | Shinzou Satou, Kou Ebihara, Keisuke Ishiwata, Kouji Miki, Hitoshi Ohmichi +2 more | 1998-05-19 |