Issued Patents All Time
Showing 76–100 of 115 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5117254 | Projection exposure apparatus | Haruna Kawashima, Masato Muraki | 1992-05-26 |
| 5105075 | Projection exposure apparatus | Masakatu Ohta | 1992-04-14 |
| 5048967 | Detection optical system for detecting a pattern on an object | Hideki Ina | 1991-09-17 |
| 5048968 | Alignment mark detecting optical system | — | 1991-09-17 |
| 5017798 | Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces | Eiichi Murakami, Michio Kohno | 1991-05-21 |
| 4952970 | Autofocusing system for a projecting exposure apparatus | Haruna Kawashima | 1990-08-28 |
| 4888614 | Observation system for a projection exposure apparatus | Hideki Ina, Masao Kosugi | 1989-12-19 |
| 4886975 | Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces | Eiichi Murakami, Michio Kohno | 1989-12-12 |
| 4883359 | Alignment method and pattern forming method using the same | Hideki Ina | 1989-11-28 |
| 4875076 | Exposure apparatus | Makoto Torigoe | 1989-10-17 |
| 4871257 | Optical apparatus for observing patterned article | Michio Kohno | 1989-10-03 |
| 4865455 | Optical device having a variable geometry filter usable for aligning a mask or reticle with a wafer | Michio Kohno | 1989-09-12 |
| 4851882 | Illumination optical system | Kazuhiro Takahashi | 1989-07-25 |
| 4834540 | Projection exposure apparatus | Masao Totsuka, Hideki Ina | 1989-05-30 |
| 4831274 | Surface inspecting device for detecting the position of foreign matter on a substrate | Michio Kohno | 1989-05-16 |
| 4830499 | Optical device capable of maintaining pupil imaging | Michio Kohno, Hideki Ina | 1989-05-16 |
| 4814829 | Projection exposure apparatus | Masao Kosugi, Hideki Ina, Kazuhito Outsuka, Shigeki Ogawa, Masao Totsuka +1 more | 1989-03-21 |
| 4799791 | Illuminance distribution measuring system | Hiroshi Echizen, Masakatsu Ota | 1989-01-24 |
| 4798450 | Imaging optical system | — | 1989-01-17 |
| 4795911 | Surface examining apparatus for detecting the presence of foreign particles on the surface | Michio Kohno, Eiichi Murakami | 1989-01-03 |
| 4780615 | Alignment system for use in pattern transfer apparatus | — | 1988-10-25 |
| 4711568 | Exposure apparatus | Makoto Torigoe, Terumasa Sakai | 1987-12-08 |
| 4688932 | Exposure apparatus | — | 1987-08-25 |
| 4688904 | Reflecting optical system | Ryusho Hirose | 1987-08-25 |
| 4659228 | Aligning apparatus | Masao Totsuka | 1987-04-21 |