Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10216092 | Light source apparatus, illumination device, exposure apparatus, and device manufacturing method | — | 2019-02-26 |
| 9772560 | Light source apparatus, illumination device, exposure apparatus, and device manufacturing method | — | 2017-09-26 |
| 8164754 | Immersion exposure apparatus and device manufacturing method | Nobuyuki Saito | 2012-04-24 |
| 8077288 | Exposure apparatus | — | 2011-12-13 |
| 7880862 | Exposure apparatus and device fabrication method | Nobuyuki Saito | 2011-02-01 |
| 7630058 | Exposure apparatus and device manufacturing method | Nobuyuki Saito | 2009-12-08 |
| 7619716 | Exposure method | Ayako Kadono | 2009-11-17 |
| 7525656 | Exposure apparatus and device fabrication method | Ayako Kadono | 2009-04-28 |
| D569293 | Button for a watch | Shigeru Hanagata, Shinichiro Oshita | 2008-05-20 |
| 7145635 | Exposure method and apparatus | — | 2006-12-05 |
| D526217 | Wrist watch | — | 2006-08-08 |
| 7057820 | Projection optical system | — | 2006-06-06 |
| 6727982 | Illumination system with plural light sources, and exposure apparatus having the same | Kazuhito Isobe, Kazuki Furuta | 2004-04-27 |
| 6023320 | Scanning exposure apparatus with surface position detecting system | — | 2000-02-08 |
| 5955739 | Surface position detection device | — | 1999-09-21 |
| 5751428 | Exposure method and exposure apparatus using the same | Yoshiharu Kataoka, Yuichi Yamada | 1998-05-12 |
| 5602400 | Surface position detecting method and apparatus including detection and correction of errors, such as surface position errors or tilt, in exposure regions | — | 1997-02-11 |
| 5489966 | Projection exposure apparatus | Akiyoshi Suzuki, Masato Muraki | 1996-02-06 |
| 5414515 | Surface position detecting device | — | 1995-05-09 |
| 5323016 | Focusing method | Yuichi Yamada, Yoshiharu Kataoka, Hiroyoshi Kubo | 1994-06-21 |
| 5218415 | Device for optically detecting inclination of a surface | — | 1993-06-08 |
| 5162642 | Device for detecting the position of a surface | Takahiro Akamatsu, Hiroyoshi Kubo | 1992-11-10 |
| 5124562 | Surface position detecting method at a predetermined and plurality of adjacent points | Akiyoshi Suzuki | 1992-06-23 |
| 5118957 | Method and apparatus for precisely detecting surface position of a patterned wafer | Akiyoshi Suzuki | 1992-06-02 |
| 5117254 | Projection exposure apparatus | Akiyoshi Suzuki, Masato Muraki | 1992-05-26 |