Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7522264 | Projection exposure apparatus, device manufacturing method, and sensor unit | — | 2009-04-21 |
| 7256868 | Projection exposure apparatus, device manufacturing method, and sensor unit | — | 2007-08-14 |
| 7154524 | Exposure apparatus including a controller configured to read electrical signals from an array of photoelectric converters | — | 2006-12-26 |
| 7027079 | Exposure apparatus including a read circuit for reading electrical signals from a plurality of photoelectric converters | — | 2006-04-11 |
| 5258823 | Alignment system | — | 1993-11-02 |
| 5162642 | Device for detecting the position of a surface | Haruna Kawashima, Hiroyoshi Kubo | 1992-11-10 |
| 4887904 | Device for positioning a semi-conductor wafer | Hiroshi Nakazato, Takashi Matsumura, Kenji Fukui | 1989-12-19 |
| 4853880 | Device for positioning a semi-conductor wafer | Hiroshi Nakazato, Takashi Matsumura, Kenji Fukui | 1989-08-01 |