Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6727982 | Illumination system with plural light sources, and exposure apparatus having the same | Haruna Kawashima, Kazuki Furuta | 2004-04-27 |
| 5150173 | Method and apparatus for alignment and exposure | Reiji Hirano | 1992-09-22 |