Issued Patents All Time
Showing 101–115 of 115 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4655601 | Observation device and an aligner using same | — | 1987-04-07 |
| 4653903 | Exposure apparatus | Makoto Torigoe, Michio Kohno | 1987-03-31 |
| 4645924 | Observation apparatus with selective light diffusion | Hideki Ina | 1987-02-24 |
| 4641035 | Apparatus and a method for position detection of an object stepped portion | Hideki Ina | 1987-02-03 |
| 4634240 | Optical apparatus using polarized light | Hideki Ina | 1987-01-06 |
| 4621890 | Optical apparatus including two afocal systems | Hideki Ina, Kazuo Takahashi | 1986-11-11 |
| 4620785 | Sheet-like member having alignment marks and an alignment apparatus for the same | Hiroshi Sato, Ichiro Ishiyama | 1986-11-04 |
| 4575250 | Aligning apparatus and method for mitigating instability caused by interference in alignment signal | — | 1986-03-11 |
| 4521082 | Exposure apparatus | Hirosi Sato, Takashi Omata, Masao Kosugi | 1985-06-04 |
| 4437758 | Alignment apparatus | — | 1984-03-20 |
| 4406546 | Photoelectric detecting device | — | 1983-09-27 |
| 4395117 | Printing apparatus having an in-focus detector | — | 1983-07-26 |
| 4315201 | Alignment apparatus for mask and wafer used in manufacturing semiconductor circuit elements | Ryozo Hiraga, Ichiro Kano, Hideki Yoshinari, Masao Totsuka, Yuzo Kato +1 more | 1982-02-09 |
| 4301363 | Alignment device | Ryozo Hiraga, Hideki Yoshinari | 1981-11-17 |
| 4278893 | Alignment apparatus | Yuzo Kato, Yasuo Ogino, Ryozo Hiraga, Hideki Yoshinari, Masao Tozuka +1 more | 1981-07-14 |