Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4806773 | Wafer position detecting method and apparatus | Hiroshi Echizen | 1989-02-21 |
| 4789294 | Wafer handling apparatus and method | Mitsuya Sato, Shunzo Imai | 1988-12-06 |
| 4553845 | Device for and method of aligning two bodies | Yoichi Kuroki, Yukihiro Yoshinari | 1985-11-19 |
| 4545684 | Alignment mark detecting apparatus and method | Yoichi Kuroki, Yukihiro Yoshinari | 1985-10-08 |
| 4530604 | Method of aligning a mask and a wafer for manufacturing semiconductor circuit elements | Kazuhisa Okutsu, Katsumi Momose | 1985-07-23 |
| 4515481 | Apparatus for processing a signal for aligning | Yasuyoshi Yamada | 1985-05-07 |
| 4504148 | System for detecting a signal for aligning two bodies and signal _processing method | Yoichi Kuroki, Yukihiro Yoshinari | 1985-03-12 |
| 4487505 | Apparatus for processing a signal for alignment | Shigeki Nakano, Yasuyoshi Yamada | 1984-12-11 |
| 4440493 | Printing apparatus | — | 1984-04-03 |
| 4315201 | Alignment apparatus for mask and wafer used in manufacturing semiconductor circuit elements | Akiyoshi Suzuki, Ichiro Kano, Hideki Yoshinari, Masao Totsuka, Yuzo Kato +1 more | 1982-02-09 |
| 4301363 | Alignment device | Akiyoshi Suzuki, Hideki Yoshinari | 1981-11-17 |
| 4278893 | Alignment apparatus | Yuzo Kato, Yasuo Ogino, Hideki Yoshinari, Masao Tozuka, Ichiro Kano +1 more | 1981-07-14 |
| 4275306 | Alignment apparatus | Yuzo Kato, Yasuo Ogino, Hideki Yoshinari, Masao Tozuka, Ichiro Kano | 1981-06-23 |
| 4262208 | Photo-electrical detecting apparatus | Akiyoshi Suzki, Ichiro Kano, Hideki Yoshinari, Masao Tozuka, Yuzo Kato +1 more | 1981-04-14 |
| 4202627 | Photoelectric detecting apparatus | Akiyoshi Suzki, Ichiro Kano, Hideki Yoshinari, Masao Tozuka, Yuzo Kato +1 more | 1980-05-13 |