Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6456364 | Semiconductor manufacturing apparatus, and device manufacturing method | — | 2002-09-24 |
| 6304005 | Power supply apparatus and method, and fabrication apparatus | Shuji Aoki | 2001-10-16 |
| 5463497 | Illumination device including an optical integrator defining a plurality of secondary light sources and related method | Masato Muraki, Akiyoshi Suzuki | 1995-10-31 |
| 5153773 | Illumination device including amplitude-division and beam movements | Masato Muraki, Akiyoshi Suzuki | 1992-10-06 |
| 4789294 | Wafer handling apparatus and method | Mitsuya Sato, Ryozo Hiraga | 1988-12-06 |
| 4758127 | Original feeding apparatus and a cassette for containing the original | Hiroshi Sato, Kazuo Iizuka | 1988-07-19 |
| 4747608 | Wafer chuck | Mitsuya Sato, Nobuyoshi Deguchi | 1988-05-31 |
| 4630922 | Pattern transfer apparatus | Ichiro Ishiyama | 1986-12-23 |