Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6927491 | Back electrode type electronic part and electronic assembly with the same mounted on printed circuit board | — | 2005-08-09 |
| 6289922 | Flow control valve | Yuji Nakano, Shigeru Hasegawa, Hiroshi Takeyama | 2001-09-18 |
| 6185474 | Exposure unit, exposure system and device manufacturing method | Takashi Nakamura, Satoshi Kyotoku | 2001-02-06 |
| 6095490 | Flow control valve for reducing valve leakage | Yuji Nakano, Shigeru Hasegawa, Hiroshi Takeyama | 2000-08-01 |
| 5810030 | Fluid control solenoid valve | Hidetoshi Uchiyama, Shinsuke Miyazaki, Akira Adachi | 1998-09-22 |
| 4794648 | Mask aligner with a wafer position detecting device | Naoki Ayata | 1988-12-27 |
| 4655599 | Mask aligner having a photo-mask setting device | Naoki Ayata | 1987-04-07 |
| 4599000 | Position detection signal processing apparatus | — | 1986-07-08 |
| 4563094 | Method and apparatus for automatic alignment | — | 1986-01-07 |
| 4515481 | Apparatus for processing a signal for aligning | Ryozo Hiraga | 1985-05-07 |
| 4487505 | Apparatus for processing a signal for alignment | Shigeki Nakano, Ryozo Hiraga | 1984-12-11 |