Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499007 | Parameter editing method and semiconductor exposure system | Bunei Hamasaki, Hiroki Suzukawa, Kenichi Kawai, Takahiro Senda | 2002-12-24 |
| 4830500 | Alignment device | Ruri Onoda | 1989-05-16 |
| 4694186 | System for photoelectric detection | Ruri Onoda, Gen Nakamura | 1987-09-15 |
| 4553845 | Device for and method of aligning two bodies | Yukihiro Yoshinari, Ryozo Hiraga | 1985-11-19 |
| 4545684 | Alignment mark detecting apparatus and method | Yukihiro Yoshinari, Ryozo Hiraga | 1985-10-08 |
| 4504148 | System for detecting a signal for aligning two bodies and signal _processing method | Yukihiro Yoshinari, Ryozo Hiraga | 1985-03-12 |