Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8248584 | Exposure apparatus and device manufacturing method | Masataro Shiroiwa | 2012-08-21 |
| 6784974 | Exposure method and exposure apparatus | — | 2004-08-31 |
| 6499007 | Parameter editing method and semiconductor exposure system | Yoichi Kuroki, Bunei Hamasaki, Kenichi Kawai, Takahiro Senda | 2002-12-24 |
| 4962423 | Mark detecting method and apparatus | Yuichi Yamada, Naoki Ayata, Hideki Nogawa | 1990-10-09 |
| 4933715 | Method of detecting position of a mark | Yuichi Yamada, Naoki Ayata, Hideki Nogawa | 1990-06-12 |