Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6473160 | Projection exposure apparatus and device manufacturing method including an aperture member having a circular light transmitting portion and a light blocking member | Akiyoshi Suzuki | 2002-10-29 |
| 6271909 | Exposure apparatus and device manufacturing method including changing a photo-intensity distribution of a light source and adjusting an illuminance distribution on a substrate in accordance with the change | Akiyoshi Suzuki | 2001-08-07 |
| 6128068 | Projection exposure apparatus including an illumination optical system that forms a secondary light source with a particular intensity distribution | Akiyoshi Suzuki | 2000-10-03 |
| 6107007 | Lithography process | Tadahiro Ohmi, Hisayuki Shimada, Shigeki Shimomura, Akiyoshi Suzuki, Mamoru Miyawaki | 2000-08-22 |
| 6084655 | Imaging method for manufacture of microdevices | Akiyoshi Suzuki | 2000-07-04 |
| 5673102 | Image farming and microdevice manufacturing method and exposure apparatus in which a light source includes four quadrants of predetermined intensity | Akiyoshi Suzuki | 1997-09-30 |
| 5587834 | Semiconductor device manufacturing method and projection exposure apparatus using the same | — | 1996-12-24 |
| 5436692 | Projection exposure apparatus and semiconductor device manufacturing method | — | 1995-07-25 |
| 5424803 | Projection exposure apparatus and semiconductor device manufacturing method | — | 1995-06-13 |
| 5305054 | Imaging method for manufacture of microdevices | Akiyoshi Suzuki | 1994-04-19 |