Issued Patents All Time
Showing 26–50 of 294 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11353857 | Data analyzer, semiconductor manufacturing system, data analysis method, and semiconductor manufacturing method | Yutaka Igarashi, Yuji MINEGISHI | 2022-06-07 |
| 11353801 | Maintenance management method for lithography system, maintenance management apparatus, and computer readable medium | Kunihiko ABE, Yuji MINEGISHI | 2022-06-07 |
| 11271360 | Wavelength converter | Atsushi Fuchimukai, Yoichi Sasaki | 2022-03-08 |
| 11264773 | Laser apparatus and method for manufacturing optical element | Daisuke TEI | 2022-03-01 |
| 11217962 | Laser system | Masaki Arakawa | 2022-01-04 |
| 11194255 | Laser processing method and laser processing system | Koji Kakizaki, Masakazu Kobayashi, Akira SUWA | 2021-12-07 |
| 11162530 | Gas laser apparatus and magnetic bearing control method | Masaharu Miki | 2021-11-02 |
| 11081850 | Gas laser apparatus | Natsushi Suzuki, Hiroaki TSUSHIMA, Masanori YASHIRO | 2021-08-03 |
| 10971883 | Gas laser apparatus | Natsushi Suzuki, Hiroaki TSUSHIMA, Masanori YASHIRO | 2021-04-06 |
| 10965087 | Laser device | Hirotaka Miyamoto | 2021-03-30 |
| 10932350 | Extreme ultraviolet light generation system | Tatsuya Yanagida | 2021-02-23 |
| 10892592 | Laser gas purifying system and laser system | Natsushi Suzuki, Masanori YASHIRO | 2021-01-12 |
| 10879664 | Laser gas regeneration system and laser system | Masanori YASHIRO, Hiroaki TSUSHIMA | 2020-12-29 |
| 10863613 | EUV light generator | Shinji Okazaki | 2020-12-08 |
| 10842010 | Extreme ultraviolet light generation system | Takayuki Yabu | 2020-11-17 |
| 10797465 | Laser apparatus | Hirotaka Miyamoto | 2020-10-06 |
| 10764986 | Extreme ultraviolet light generation apparatus | Shinji Nagai, Tamotsu Abe, Hitoshi Nagano | 2020-09-01 |
| 10739686 | Beam transmission system, exposure device, and illumination optical system of the exposure device | Akiyoshi Suzuki | 2020-08-11 |
| 10710194 | Laser processing system and laser processing method | Kouji Kakizaki | 2020-07-14 |
| 10673200 | Excimer laser apparatus | Yousuke FUJIMAKI, Hiroaki TSUSHIMA, Hiroyuki Ikeda | 2020-06-02 |
| 10666008 | Gas laser apparatus | Natsushi Suzuki, Hiroaki TSUSHIMA, Masanori YASHIRO | 2020-05-26 |
| 10651049 | Laser annealing device | Hiroshi Ikenoue, Tomoyuki OHKUBO | 2020-05-12 |
| 10630042 | System and method for generating extreme ultraviolet light, and laser apparatus | Tatsuya Yanagida | 2020-04-21 |
| 10629438 | Laser doping apparatus and laser doping method | Tomoyuki OHKUBO, Hiroshi Ikenoue, Akihiro Ikeda, Tanemasa Asano | 2020-04-21 |
| 10629414 | Target supply device, target material refining method, recording medium having target material refining program recorded therein, and target generator | Fumio Iwamoto, Yutaka Shiraishi, Tsukasa HORI | 2020-04-21 |