Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10629438 | Laser doping apparatus and laser doping method | Tomoyuki OHKUBO, Hiroshi Ikenoue, Akihiro Ikeda, Osamu Wakabayashi | 2020-04-21 |
| 9659775 | Method for doping impurities, method for manufacturing semiconductor device | Akihiro Ikeda, Hiroshi Ikenoue, Kenichi Iguchi, Haruo Nakazawa, Koh Yoshikawa +1 more | 2017-05-23 |
| 6418941 | Method of and apparatus for plasma cleaning of chip-mounted board | Kiyoshi Arita | 2002-07-16 |