Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12389508 | Light source parameter information management method, light source parameter information management apparatus, and computer readable medium | Osamu Wakabayashi | 2025-08-12 |
| 11822324 | Machine learning method, consumable management apparatus, and computer readable medium | Kunihiko ABE, Satoru Kikuchi, Osamu Wakabayashi | 2023-11-21 |
| 11353801 | Maintenance management method for lithography system, maintenance management apparatus, and computer readable medium | Kunihiko ABE, Osamu Wakabayashi | 2022-06-07 |
| 11353857 | Data analyzer, semiconductor manufacturing system, data analysis method, and semiconductor manufacturing method | Yutaka Igarashi, Osamu Wakabayashi | 2022-06-07 |
| 10394133 | Laser unit management system | Yutaka Igarashi, Takeshi Ohta | 2019-08-27 |