Issued Patents All Time
Showing 51–75 of 294 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10615565 | Line narrowed laser apparatus | Hiroshi Furusato, Keisuke Ishida, Takeshi Ohta, Takahito Kumazaki | 2020-04-07 |
| 10587089 | Solid-state laser device, solid-state laser system, and laser device for exposure device | Takashi Onose | 2020-03-10 |
| 10555408 | Extreme ultraviolet light generation system | Tatsuya Yanagida | 2020-02-04 |
| 10512148 | System and method for generating extreme ultraviolet light employing laser pulse including pedestal | Hitoshi Nagano, Yasunori Wada, Tatsuya Yanagida | 2019-12-17 |
| 10495890 | Laser system or laser exposure system | Kouji Kakizaki, Junichi Fujimoto | 2019-12-03 |
| 10475650 | Laser doping device and semiconductor device manufacturing method | Hiroshi Ikenoue, Akira SUWA | 2019-11-12 |
| 10466414 | Grating, method for manufacturing grating, and method for recycling grating | Hirotaka Miyamoto | 2019-11-05 |
| 10447001 | Laser unit | Minoru Taniyama, Hakaru Mizoguchi | 2019-10-15 |
| 10374382 | Solid-state laser device, solid-state laser system, and laser device for exposure device | Takashi Onose | 2019-08-06 |
| 10371469 | Device for controlling temperature of cooling water | Yasufumi Kawasuji, Masazumi Komori | 2019-08-06 |
| 10314152 | Extreme ultraviolet light generation apparatus | Shinji Nagai, Tamotsu Abe, Hitoshi Nagano | 2019-06-04 |
| 10306743 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Tatsuya Yanagida, Hakaru Mizoguchi | 2019-05-28 |
| 10290992 | Laser system | Hiroshi Umeda | 2019-05-14 |
| 10283927 | Line narrowed laser apparatus | Hiroshi Furusato, Takeshi Ohta, Natsuhiko KOUNO, Takahito Kumazaki | 2019-05-07 |
| 10268109 | Projector and image light projection method | — | 2019-04-23 |
| 10256594 | Solid-state laser system | Takashi Onose | 2019-04-09 |
| 10251255 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Tatsuya Yanagida, Hakaru Mizoguchi | 2019-04-02 |
| 10205297 | Narrow band excimer laser apparatus | Hirotaka Miyamoto | 2019-02-12 |
| 10177520 | Excimer laser apparatus and excimer laser system | Takeshi Asayama, Kouji Kakizaki | 2019-01-08 |
| 10172225 | Extreme ultraviolet light generation apparatus | Toru Suzuki, Tamotsu Abe, Tatsuya Yanagida | 2019-01-01 |
| 10164396 | Laser unit and non-transitory computer-readable storage medium | Akihiko KUROSU, Takashi Matsunaga, Hiroyuki Masuda, Hiroaki TSUSHIMA, Masanori YASHIRO +1 more | 2018-12-25 |
| 10151640 | Light beam measurement device, laser apparatus, and light beam separator | Masato Moriya, Yoshinobu WATABE | 2018-12-11 |
| 10117317 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Tatsuya Yanagida, Hakaru Mizoguchi | 2018-10-30 |
| 10103509 | Excimer laser device | Kouji Kakizaki, Akira SUWA, Hiroshi Umeda | 2018-10-16 |
| 10092979 | Laser irradiation apparatus | Akiyoshi Suzuki, Minoru Taniyama | 2018-10-09 |