Issued Patents All Time
Showing 101–125 of 294 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9791780 | Exposure apparatus | Takashi Onose, Kouji Kakizaki, Akiyoshi Suzuki | 2017-10-17 |
| 9722384 | Gas laser apparatus | Natsushi Suzuki, Hiroaki TSUSHIMA, Masanori YASHIRO | 2017-08-01 |
| 9711934 | Laser apparatus | Takashi Matsunaga | 2017-07-18 |
| 9667019 | Laser apparatus and extreme ultraviolet light generation system | Masato Moriya, Takashi Suganuma | 2017-05-30 |
| 9661730 | Extreme ultraviolet light generation apparatus with a gas supply toward a trajectory of a target | Atsushi Ueda, Takayuki Yabu, Georg Soumagne, Takashi Saito | 2017-05-23 |
| 9647415 | Laser apparatus and method of controlling laser apparatus | Hiroaki TSUSHIMA, Takashi Matsunaga | 2017-05-09 |
| 9647411 | Method of controlling wavelength of laser beam and laser apparatus | Takashi Matsunaga, Takahito Kumazaki | 2017-05-09 |
| 9647406 | Laser unit and extreme ultraviolet light generating system | Takashi Suganuma, Takayuki Yabu, Seiji Nogiwa | 2017-05-09 |
| 9622332 | Extreme ultraviolet light generation apparatus | Toru Suzuki, Hiroshi Tanaka, Hideyuki Hayashi | 2017-04-11 |
| 9601893 | Laser apparatus | Kouji Kakizaki, Takeshi Asayama | 2017-03-21 |
| 9578730 | Extreme ultraviolet light generation apparatus and extreme ultraviolet light generation system | Tamotsu Abe | 2017-02-21 |
| 9574935 | System for generating extreme ultra violet light | Masato Moriya | 2017-02-21 |
| 9570884 | Laser apparatus, extreme ultraviolet light generation system, method for controlling the laser apparatus, and method for generating the extreme ultraviolet light | Krzysztof Nowak | 2017-02-14 |
| 9538629 | Chamber for extreme ultraviolet light generation apparatus, and extreme ultraviolet light generation apparatus | Takashi Saito, Naoyoshi IMACHI | 2017-01-03 |
| 9510434 | Extreme ultraviolet light generating apparatus, method of generating extreme ultraviolet light, concentrated pulsed laser light beam measuring apparatus, and method of measuring concentrated pulsed laser light beam | Hakaru Mizoguchi, Yasufumi Kawasuji | 2016-11-29 |
| 9509115 | System and method for generating extreme ultraviolet light, and laser apparatus | Tatsuya Yanagida | 2016-11-29 |
| 9510433 | Extreme ultraviolet light generation apparatus | Shinji Nagai, Tamotsu Abe, Hitoshi Nagano | 2016-11-29 |
| 9507248 | Two-beam interference apparatus and two-beam interference exposure system | Shinji Okazaki, Hakaru Mizoguchi, Junichi Fujimoto, Takashi Matsunaga, Kouji Kakizaki | 2016-11-29 |
| 9497841 | Extreme ultraviolet light generation system | Tatsuya Yanagida | 2016-11-15 |
| 9497842 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Tatsuya Yanagida, Hakaru Mizoguchi | 2016-11-15 |
| 9490603 | Laser apparatus and method of controlling laser apparatus | Hiroaki TSUSHIMA, Takahito Kumazaki, Takashi Matsunaga | 2016-11-08 |
| 9468082 | Extreme ultraviolet light generation apparatus and control method for laser apparatus in extreme ultraviolet light generation system | Hideyuki Hayashi, Kazuhiro Suzuki | 2016-10-11 |
| 9439276 | Extreme ultraviolet light generating system | Takayuki Yabu, Takashi Saito | 2016-09-06 |
| 9439275 | System and method for generating extreme ultraviolet light | Masato Moriya | 2016-09-06 |
| 9429847 | Extreme ultraviolet light source apparatus | Toshihiro Nishisaka, Yukio Watanabe, Kouji Kakizaki, Michio Shinozaki | 2016-08-30 |