Issued Patents All Time
Showing 126–150 of 294 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9425576 | Excimer laser apparatus and excimer laser system | Tooru Abe, Takeshi Ohta, Hiroaki TSUSHIMA | 2016-08-23 |
| 9407052 | Amplifier, laser apparatus, and extreme ultraviolet light generation system | Krzysztof Nowak | 2016-08-02 |
| 9402297 | Extreme ultraviolet light generation system | Tatsuya Yanagida, Hakaru Mizoguchi | 2016-07-26 |
| 9386675 | Laser beam controlling device and extreme ultraviolet light generating apparatus | Toru Suzuki | 2016-07-05 |
| 9362703 | Optical device, laser apparatus, and extreme ultraviolet light generation system | Hakaru Mizoguchi, Takashi Suganuma, Hideo Hoshino | 2016-06-07 |
| 9363878 | Device for controlling laser beam and apparatus for generating extreme ultraviolet light utilizing wavefront adjusters | Masato Moriya | 2016-06-07 |
| 9350133 | Method of controlling laser apparatus and laser apparatus | Hiroaki TSUSHIMA, Kouji Kakizaki | 2016-05-24 |
| 9351388 | Target generation device and extreme ultraviolet light generation apparatus | Masaki Nakano | 2016-05-24 |
| 9332625 | Extreme ultraviolet light source apparatus | Toshihiro Nishisaka, Yukio Watanabe, Kouji Kakizaki, Michio Shinozaki | 2016-05-03 |
| 9331450 | Laser apparatus | Takeshi Asayama, Hakaru Mizoguchi, Kouji Kakizaki, Hiroaki TSUSHIMA, Kazuya Takezawa | 2016-05-03 |
| 9325150 | Alignment system and extreme ultraviolet light generation system | Masato Moriya | 2016-04-26 |
| 9318864 | Laser beam output control with optical shutter | Krzysztof Nowak, Hideo Hoshino | 2016-04-19 |
| 9277635 | Method for generating extreme ultraviolet light and device for generating extreme ultraviolet light | Masato Moriya, Hideyuki Hayashi | 2016-03-01 |
| 9271382 | Laser apparatus and extreme ultraviolet light generation apparatus | Masato Moriya | 2016-02-23 |
| 9265136 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Tatsuya Yanagida, Hakaru Mizoguchi | 2016-02-16 |
| 9257809 | Laser device for exposure apparatus | Hidenori Watanabe, Hiroshi Tanaka | 2016-02-09 |
| 9233782 | Target supply device | Takanobu Ishihara, Toshihiro Nishisaka, Hiroshi Someya | 2016-01-12 |
| 9229192 | Mirror device | Hiroshi Someya, Yukio Watanabe, Katsuhiko Wakana | 2016-01-05 |
| 9225139 | Discharge-pumped gas laser device | Akihiko KUROSU, Junichi Fujimoto, Yosuke Ishizuka, Takashi Matsunaga | 2015-12-29 |
| 9198273 | Extreme ultraviolet light generation apparatus | Miwa Igarashi, Yukio Watanabe, Kouji Ashikawa, Norio Iwai | 2015-11-24 |
| 9198272 | Target generation device and extreme ultraviolet light generation apparatus | Masaki Nakano | 2015-11-24 |
| 9184555 | Laser system and laser light generation method | Masaya Yoshino, Takashi Onose | 2015-11-10 |
| 9184551 | Laser apparatus and extreme ultraviolet light generation system | Takashi Suganuma, Hidenobu Kameda, Masato Moriya | 2015-11-10 |
| 9179534 | Extreme ultraviolet light source apparatus | Yukio Watanabe, Miwa Igarashi | 2015-11-03 |
| 9167678 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Tatsuya Yanagida | 2015-10-20 |