Issued Patents All Time
Showing 151–175 of 294 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9153927 | Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system | Krzysztof Nowak, Takashi Suganuma | 2015-10-06 |
| 9130345 | System and method for generating extreme ultraviolet light, and laser apparatus | Tatsuya Yanagida | 2015-09-08 |
| 9131589 | Extreme ultraviolet light generation apparatus and control method for laser apparatus in extreme ultraviolet light generation system | Hideyuki Hayashi, Kazuhiro Suzuki | 2015-09-08 |
| 9128391 | Optical device including wavefront correction parts and beam direction parts, laser apparatus including the optical device, and extreme ultraviolet light generation system including the laser apparatus | Masato Moriya | 2015-09-08 |
| 9113540 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Tatsuya Yanagida | 2015-08-18 |
| 9099836 | Laser beam amplifier and laser apparatus using the same | Krzysztof Nowak, Masato Moriya | 2015-08-04 |
| 9097434 | Target supply apparatus and target supply method | Takayuki Yabu | 2015-08-04 |
| 9072152 | Extreme ultraviolet light generation system utilizing a variation value formula for the intensity | Tatsuya Yanagida | 2015-06-30 |
| 9071036 | Laser apparatus | Takahito Kumazaki, Takashi Onose | 2015-06-30 |
| 9072153 | Extreme ultraviolet light generation system utilizing a pre-pulse to create a diffused dome shaped target | Tatsuya Yanagida, Hakaru Mizoguchi | 2015-06-30 |
| 9059554 | Discharge-pumped gas laser device | Akihiko KUROSU, Junichi Fujimoto, Yosuke Ishizuka, Takashi Matsunaga | 2015-06-16 |
| 9055657 | Extreme ultraviolet light generation by polarized laser beam | Tsukasa HORI, Junichi Fujimoto | 2015-06-09 |
| 9052615 | Extreme ultraviolet light source apparatus | Toshihiro Nishisaka, Yukio Watanabe, Kouji Kakizaki, Michio Shinozaki | 2015-06-09 |
| 9046651 | Mirror device | Hiroshi Someya, Yukio Watanabe, Katsuhiko Wakana | 2015-06-02 |
| 9039957 | Target material refinement device and target supply apparatus | Yutaka Shiraishi | 2015-05-26 |
| 9036251 | Slab amplification device, laser apparatus, and extreme ultraviolet light generation system | Krzysztof Nowak, Takashi Suganuma | 2015-05-19 |
| 8989225 | Laser apparatus | Kouji Kakizaki, Shinji Okazaki, Takashi Onose, Shinichi Matsumoto | 2015-03-24 |
| 8957356 | System and method for generating extreme ultraviolet light | Masato Moriya | 2015-02-17 |
| 8927951 | Target supply device | Hiroshi Umeda, Takashi Ohara | 2015-01-06 |
| 8921815 | Target supply device | Hiroshi Umeda | 2014-12-30 |
| 8902948 | Polarization purity control device and gas laser apparatus provided with the same | Shinji Nagai, Fumika Yoshida, Kouji Kakizaki | 2014-12-02 |
| 8901522 | Chamber apparatus and extreme ultraviolet light generation system | Yoshifumi Ueno, Shinji Nagai | 2014-12-02 |
| 8891574 | Polarization purity control device and gas laser apparatus provided with the same | Shinji Nagai, Fumika Yoshida, Kouji Kakizaki | 2014-11-18 |
| 8891161 | Optical device, laser apparatus, and extreme ultraviolet light generation system | Hakaru Mizoguchi, Takashi Suganuma, Hideo Hoshino | 2014-11-18 |
| 8885680 | Laser apparatus, extreme ultraviolet light generation system, and method for generating laser beam | Hiroaki Nakarai, Hideo Hoshino | 2014-11-11 |