Issued Patents All Time
Showing 176–200 of 294 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8872142 | Extreme ultraviolet light generation apparatus | Shinji Nagai, Tamotsu Abe, Hitoshi Nagano | 2014-10-28 |
| 8867583 | Excimer laser apparatus and excimer laser system | Tooru Abe, Takeshi Ohta, Hiroaki TSUSHIMA | 2014-10-21 |
| 8861558 | Laser system and laser light generation method | Masaya Yoshino, Takashi Onose | 2014-10-14 |
| 8855167 | Gas discharge chamber | Shinji Nagai, Fumika Yoshida, Kouji Kakizaki | 2014-10-07 |
| 8855164 | Laser apparatus | Yasufumi Kawasuji, Junichi Fujimoto, Hideo Iwase | 2014-10-07 |
| 8847181 | System and method for generating extreme ultraviolet light | Masato Moriya, Hideyuki Hayashi | 2014-09-30 |
| 8817839 | Two-stage laser system for aligners | Tatsuya Ariga, Takahito Kumazaki, Kotaro Sasano | 2014-08-26 |
| 8811436 | Laser apparatus, extreme ultraviolet light generation system including the laser apparatus, and method for controlling the laser apparatus | Kenichi Miyao, Motoki Niwano | 2014-08-19 |
| 8809821 | Holder device, chamber apparatus, and extreme ultraviolet light generation system | Junichi Fujimoto, Hidenobu Kameda, Kouji Ashikawa | 2014-08-19 |
| 8804778 | Laser apparatus and extreme ultraviolet light source apparatus | Akira Endo, Krzysztof Nowak, Takashi Suganuma, Masato Moriya | 2014-08-12 |
| 8804780 | Method for adjusting spectral line width of narrow-band laser | Takahito Kumazaki, Toru Suzuki, Masashi Shinbori, Masaya Yoshino | 2014-08-12 |
| 8779402 | Target supply device | Takayuki Yabu, Yukio Watanabe, Toshihiro Nishisaka, Hiroshi Someya | 2014-07-15 |
| 8759804 | Chamber apparatus and extreme ultraviolet light generation system | Toshihiro Nishisaka, Yukio Watanabe, Tamotsu Abe | 2014-06-24 |
| 8748853 | Chamber apparatus | Shinji Nagai, Yutaka Shiraishi, Junichi Fujimoto | 2014-06-10 |
| 8749876 | Regenerative amplifier, laser apparatus, and extreme ultraviolet light generation system | Krzysztof Nowak, Takashi Suganuma | 2014-06-10 |
| 8742379 | Window unit, window device, laser apparatus, and extreme ultraviolet light generation system | Hidenobu Kameda, Masato Moriya | 2014-06-03 |
| 8710474 | Extreme ultraviolet light generation apparatus | Takeshi Kodama | 2014-04-29 |
| 8710473 | Droplet generation and detection device, and droplet control device | Hakaru Mizoguchi, Kouji Kakizaki, Masahiro Inoue | 2014-04-29 |
| 8705035 | Target generation device | Takanobu Ishihara, Tamotsu Abe | 2014-04-22 |
| 8698111 | Extreme ultraviolet light generation system | Toshihiro Nishisaka, Yukio Watanabe, Hideo Hoshino | 2014-04-15 |
| 8698116 | Extreme ultra violet light source apparatus | Masato Moriya, Tamotsu Abe, Takashi Suganuma, Akira Endo, Akira Sumitani | 2014-04-15 |
| 8698114 | Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source, and method of adjusting laser light source device for extreme ultraviolet light source device | Masato Moriya, Hideo Hoshino, Hakaru Mizoguchi | 2014-04-15 |
| 8698113 | Chamber apparatus and extreme ultraviolet (EUV) light generation apparatus including the chamber apparatus | Masato Moriya | 2014-04-15 |
| 8698112 | Extreme ultraviolet light generation apparatus | Takayuki Yabu, Kouji Kakizaki, Takanobu Ishihara, Tamotsu Abe | 2014-04-15 |
| 8692220 | Extreme ultraviolet light source device and control method for extreme ultraviolet light source device | Masato Moriya | 2014-04-08 |