Issued Patents All Time
Showing 201–225 of 294 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8675697 | Master oscillator system and laser apparatus | Satoshi Tanaka, Hiroshi Tanaka | 2014-03-18 |
| 8675700 | Laser system and laser light generation method | Shuntaro Watanabe, Takashi Onose | 2014-03-18 |
| 8669543 | System and method for generating extreme ultraviolet light, and laser apparatus | Tatsuya Yanagida | 2014-03-11 |
| 8669542 | Extreme ultraviolet light source apparatus | Yukio Watanabe, Miwa Igarashi | 2014-03-11 |
| 8629417 | Extreme ultraviolet light generation apparatus | Shinji Nagai, Tamotsu Abe, Takanobu Ishihara | 2014-01-14 |
| 8625645 | Solid-state laser apparatus and laser system | Takashi Onose, Shinji Ito | 2014-01-07 |
| 8624208 | Extreme ultraviolet light generation system | Shinji Nagai, Tamotsu Abe, Hitoshi Nagano | 2014-01-07 |
| 8611393 | Laser apparatus | Junichi Fujimoto, Takahito Kumazaki, Toru Suzuki, Satoshi Tanaka | 2013-12-17 |
| 8610095 | Extreme ultraviolet light source device | Takayuki Yabu, Takeshi Asayama, Fumika Yoshida | 2013-12-17 |
| 8604453 | Extreme ultraviolet light source apparatus and method of generating ultraviolet light | Akira Endo, Yoshifumi Ueno, Youichi Sasaki | 2013-12-10 |
| 8592787 | Mirror for extreme ultra violet, manufacturing method for mirror for extreme ultra violet, and far ultraviolet light source device | Masato Moriya, Georg Soumagne | 2013-11-26 |
| 8587863 | Wavelength conversion device, solid-state laser apparatus, and laser system | Takashi Onose | 2013-11-19 |
| 8569722 | Extreme ultraviolet light generation apparatus | Kouji Kakizaki, Tooru Abe | 2013-10-29 |
| 8559099 | Laser beam amplifier and laser apparatus using the same | Krzysztof Nowak, Masato Moriya | 2013-10-15 |
| 8536551 | Extreme ultra violet light source apparatus | Masato Moriya, Tamotsu Abe, Takashi Suganuma, Akira Endo, Akira Sumitani | 2013-09-17 |
| 8525140 | Chamber apparatus, extreme ultraviolet light generation system, and method for controlling the extreme ultraviolet light generation system | Tooru Abe | 2013-09-03 |
| 8507883 | Extreme ultraviolet light source apparatus | Akira Endo, Hideo Hoshino, Kouji Kakizaki, Tamotsu Abe, Akira Sumitani +3 more | 2013-08-13 |
| 8507885 | Semiconductor exposure device using extreme ultra violet radiation | Masato Moriya, Georg Soumagne | 2013-08-13 |
| 8503499 | Gas discharge chamber | Shinji Nagai, Fumika Yoshida, Kouji Kakizaki | 2013-08-06 |
| 8497489 | Chamber apparatus and method of maintaining target supply unit | Takayuki Yabu, Kouji Kakizaki, Yukio Watanabe | 2013-07-30 |
| 8492738 | Apparatus for and method of withdrawing ions in EUV light production apparatus | Yoshifumi Ueno, Tamotsu Abe, Akira Sumitani, Hideo Hoshino, Akira Endo +1 more | 2013-07-23 |
| 8476609 | Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device, and method for controlling saturable absorber used in extreme ultraviolet light source device | Akira Endo, Krzysztof Nowak, Hideo Hoshino, Tatsuya Ariga, Masato Moriya | 2013-07-02 |
| 8455850 | Extreme ultraviolet light source apparatus and method of generating extreme ultraviolet light | Akira Endo, Yoshifumi Ueno, Youichi Sasaki | 2013-06-04 |
| 8445876 | Extreme ultraviolet light source apparatus | Takashi Suganuma, Masato Moriya, Tamotsu Abe, Kouji Kakizaki | 2013-05-21 |
| 8399870 | Extreme ultraviolet light source device and control method for extreme ultraviolet light source device | Masato Moriya | 2013-03-19 |