Issued Patents All Time
Showing 251–275 of 294 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7006309 | Prism unit and laser device | Georg Soumagne, Takahito Kumazaki | 2006-02-28 |
| 6973111 | Injection locking type or MOPA type of gas laser device | Toshio Yamashita | 2005-12-06 |
| 6879617 | Two stage laser system | Tatsuya Ariga, Kyohei Seki | 2005-04-12 |
| 6819699 | Arf excimer laser device, scanning type exposure device and ultraviolet laser device | Tatsuo Enami, Katsutomo Terashima, Kiwamu Takehisa, Tsukasa HORI, Hakaru Mizoguchi | 2004-11-16 |
| 6810061 | Discharge electrode and discharge electrode manufacturing method | Tsukasa HORI, Akira Sumitani, Takayuki Yabu, Teiichirou Chiba, Hakaru Mizoguchi +1 more | 2004-10-26 |
| 6741627 | Photolithographic molecular fluorine laser system | Naoki Kitatochi, Tatsuya Ariga | 2004-05-25 |
| 6721344 | Injection locking type or MOPA type of laser device | Kiyoharu Nakao | 2004-04-13 |
| RE38372 | Narrow band excimer laser and wavelength detecting apparatus | Masahiko Kowaka, Yukio Kobayashi | 2003-12-30 |
| 6636297 | Vacuum ultraviolet laser wavelength measuring apparatus | Tatsuo Enami, Shinji Nagai | 2003-10-21 |
| 6627843 | Casing for laser device, production method and cleaning method of the same | Yasuo Itakura, Fumika Yoshida | 2003-09-30 |
| 6628682 | Wavelength detection device for line-narrowed laser apparatus and ultra line-narrowed fluorine laser apparatus | Kiwamu Takehisa, Kouji Shio, Shinji Nagai, Yasuaki Iwata | 2003-09-30 |
| 6583874 | Spectrometer with holographic and echelle gratings | Toru Suzuki | 2003-06-24 |
| 6573989 | Spectrometer | Toru Suzuki | 2003-06-03 |
| 6560269 | Fluorine laser device | Kiwamu Takehisa, Tatsuya Ariga | 2003-05-06 |
| 6553042 | Laser apparatus for generating vacuum ultraviolet narrow-band laser beams | Koji Shio, Toru Suzuki | 2003-04-22 |
| 6539037 | Laser apparatus | Koji Shio, Toru Suzuki | 2003-03-25 |
| 6526086 | Band narrowing laser | Hirokazu Tanaka, Tatsuya Ariga | 2003-02-25 |
| 6496527 | Ultraviolet laser apparatus and gas for ultraviolet laser | Katsutomo Terashima, Akira Sumitani | 2002-12-17 |
| 6456361 | Method and instrument for measuring vacuum ultraviolet light beam, method of producing device and optical exposure apparatus | Toru Suzuki | 2002-09-24 |
| 6418155 | Laser device | Tatsuya Ariga, Toru Igarashi, Shoichi Sakanishi, Tomokazu Takahashi | 2002-07-09 |
| 6317203 | Narrowband module inspection device | Takanori Nakaike | 2001-11-13 |
| 6243163 | Wavelength detector | Tatsuo Enami, Shinji Nagai, Toru Suzuki, Takeshi Ohta, Hirokazu Kubo | 2001-06-05 |
| 6151350 | Gas laser | Hiroshi Komori, Yoshiho Amada | 2000-11-21 |
| 6101211 | Narrow-band laser apparatus | Hiroshi Komori, Hakaru Mizoguchi | 2000-08-08 |
| 6084897 | Laser processing device and laser device | Tetsuo Shakushi | 2000-07-04 |