Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334705 | Laser apparatus and electronic device manufacturing method | Yuki TAMARU | 2025-06-17 |
| 12160085 | Laser system and electronic device manufacturing method | Takashi Onose, Osamu Wakabayashi | 2024-12-03 |
| 11870209 | Laser system and electronic device manufacturing method | Yuki TAMARU | 2024-01-09 |
| 11804697 | Laser system and electronic device manufacturing method | Osamu Wakabayashi | 2023-10-31 |
| 11764541 | Laser system and method for manufacturing electronic device | Osamu Wakabayashi, Hironori IGARASHI | 2023-09-19 |
| 7680158 | LPP type extreme ultra violet light source apparatus and driver laser for the same | Akira Endo, Tatsuya Ariga, Takashi Suganuma | 2010-03-16 |
| 7649188 | LPP type extreme ultra violet light source apparatus and driver laser for the same | Akira Endo, Tatsuya Ariga, Takashi Suganuma | 2010-01-19 |
| 7428085 | Method for producing hologram by pico-second laser | Hideo Hosono, Masahiro Hirano, Kenichi Kawamura, Hayato Kamioka | 2008-09-23 |
| 7123635 | Helium-cooled laser device | Yusuke Tamaki, Kazuya Takasago, Hitoshi Sekita | 2006-10-17 |
| 7012940 | Laser resonator and adjustment method | Yusuke Tamaki, Hitoshi Sekita, Kazuya Takasago | 2006-03-14 |
| 6882469 | Regenerative optical amplifier | Yusuke Tamaki, Kazuya Takasago, Hitoshi Sekita | 2005-04-19 |