Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9113540 | System and method for generating extreme ultraviolet light | Tsukasa HORI, Kouji Kakizaki, Osamu Wakabayashi | 2015-08-18 |
| 9072153 | Extreme ultraviolet light generation system utilizing a pre-pulse to create a diffused dome shaped target | Osamu Wakabayashi, Hakaru Mizoguchi | 2015-06-30 |
| 9072152 | Extreme ultraviolet light generation system utilizing a variation value formula for the intensity | Osamu Wakabayashi | 2015-06-30 |
| 8853656 | Extreme ultraviolet light source device | Masaki Nakano, Akira Endo | 2014-10-07 |
| 8841641 | Extreme ultraviolet light source apparatus | Kouji Kakizaki, Shinji Nagai | 2014-09-23 |
| 8742380 | Target supply device, extreme ultraviolet light generation apparatus, and method for supplying target | Tsukasa HORI, Hideo Hoshino | 2014-06-03 |
| 8710475 | Extreme ultraviolet light source device and method for generating extreme ultraviolet light | Hiroshi Komori, Yoshifumi Ueno, Akira Sumitani, Akira Endo, Tsukasa HORI | 2014-04-29 |
| 8669909 | Antenna, antenna apparatus, and communication apparatus | Shuichiro Yamaguchi, Yasutaka Hieda | 2014-03-11 |
| 8669543 | System and method for generating extreme ultraviolet light, and laser apparatus | Osamu Wakabayashi | 2014-03-11 |
| 8558202 | Extreme ultraviolet light source apparatus | Akira Endo, Hiroshi Komori, Shinji Nagai, Kouji Kakizaki, Tamotsu Abe +1 more | 2013-10-15 |
| 8530870 | Extreme ultraviolet light source apparatus | Kouji Kakizaki, Shinji Nagai | 2013-09-10 |
| 8513630 | Extreme ultraviolet light source apparatus | Yoshifumi Ueno, Georg Soumagne, Shinji Nagai, Akira Endo | 2013-08-20 |
| 8471226 | Extreme ultraviolet light source device and method for producing extreme ultraviolet light | Hiroshi Komori, Yoshifumi Ueno, Akira Sumitani, Akira Endo, Tsukasa HORI | 2013-06-25 |
| 8436328 | Extreme ultraviolet light source apparatus | Akira Endo, Hiroshi Komori, Shinji Nagai, Kouji Kakizaki, Tamotsu Abe +1 more | 2013-05-07 |
| 8067756 | Extreme ultraviolet light source apparatus | Yoshifumi Ueno, Georg Soumagne, Shinji Nagai, Akira Endo | 2011-11-29 |