Issued Patents All Time
Showing 26–50 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7829871 | Sheet beam-type testing apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa +3 more | 2010-11-09 |
| 7745784 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Tohru Satake, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji +9 more | 2010-06-29 |
| 7741601 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama +7 more | 2010-06-22 |
| 7601972 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa +5 more | 2009-10-13 |
| 7599052 | Method for marking defect and device therefor | Mitsuaki Uesugi, Masaichi Inomata, Tsutomu Kawamura, Takahiko Oshige, Hiroyuki Sugiura +11 more | 2009-10-06 |
| 7569838 | Electron beam inspection system and inspection method and method of manufacturing devices using the system | Kenji Watanabe, Hirosi Sobukawa, Nobuharu Noji, Tohru Satake, Tsutomu Karimata +7 more | 2009-08-04 |
| 7479634 | Electron beam apparatus and device manufacturing method using the same | Mamoru Nakasuji, Takao Kato, Kenji Watanabe, Tohru Satake, Nobuharu Noji | 2009-01-20 |
| 7439502 | Electron beam apparatus and device production method using the electron beam apparatus | Mamoru Nakasuji, Tohru Satake, Nobuharu Noji, Hirosi Sobukawa, Tsutomu Karimata +6 more | 2008-10-21 |
| 7423744 | Method for marking defect and device therefor | Mitsuaki Uesugi, Masaichi Inomata, Tsutomu Kawamura, Takahiko Oshige, Hiroyuki Sugiura +11 more | 2008-09-09 |
| 7423267 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Kenji Watanabe +7 more | 2008-09-09 |
| 7417236 | Sheet beam-type testing apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa +3 more | 2008-08-26 |
| 7411191 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba +9 more | 2008-08-12 |
| 7408175 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2008-08-05 |
| 7403279 | Information recording medium examining apparatus and method | Keiichi Tohyama, Nobuharu Noji | 2008-07-22 |
| 7365324 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama +7 more | 2008-04-29 |
| 7351969 | Electron beam inspection system and inspection method and method of manufacturing devices using the system | Kenji Watanabe, Hirosi Sobukawa, Nobuharu Noji, Tohru Satake, Tsutomu Karimata +7 more | 2008-04-01 |
| 7305149 | Image pickup information recognition system | Katsuhiko Yamada, Masafumi Yamaguchi, Akito Takeya | 2007-12-04 |
| 7297949 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa +5 more | 2007-11-20 |
| 7247848 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Tohru Satake, Kenji Watanabe, Takeshi Murakami, Nobuharu Noji +9 more | 2007-07-24 |
| 7248366 | Method for marking defect and device therefor | Mitsuaki Uesugi, Masaichi Inomata, Tsutomu Kawamura, Takahiko Oshige, Hiroyuki Sugiura +11 more | 2007-07-24 |
| 7244932 | Electron beam apparatus and device fabrication method using the electron beam apparatus | Mamoru Nakasuji, Tohru Satake, Nobuharu Noji, Hirosi Sobukawa, Tsutomu Karimata +6 more | 2007-07-17 |
| 7241993 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba +9 more | 2007-07-10 |
| 7223973 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2007-05-29 |
| 7205540 | Electron beam apparatus and device manufacturing method using same | Mamoru Nakasuji, Takao Kato, Kenji Watanabe, Tohru Satake, Nobuharu Noji | 2007-04-17 |
| 7157703 | Electron beam system | Mamoru Nakasuji, Tohru Satake, Nobuharu Noji, Takeshi Murakami | 2007-01-02 |