Issued Patents All Time
Showing 51–75 of 97 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7521692 | TDI detecting device, a feed-through equipment, an electron beam apparatus using these device and equipment, and a semiconductor device manufacturing method using the same electron beam apparatus | Tohru Satake, Takeshi Murakami, Kenji Watanabe, Nobuharu Noji | 2009-04-21 |
| 7449691 | Detecting apparatus and device manufacturing method | Takeshi Murakami, Tohru Satake, Nobuharu Noji, Ichirota Nagahama, Yuichiro Yamazaki | 2008-11-11 |
| 7423267 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Kenji Watanabe, Takao Kato +7 more | 2008-09-09 |
| 7411191 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hiroshi Sobukawa +9 more | 2008-08-12 |
| 7408175 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2008-08-05 |
| 7391036 | Sample surface inspection apparatus and method | Kenji Watanabe, Takeshi Murakami, Tohru Satake, Nobuharu Noji | 2008-06-24 |
| 7365324 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Shoji Yoshikawa +7 more | 2008-04-29 |
| 7351969 | Electron beam inspection system and inspection method and method of manufacturing devices using the system | Kenji Watanabe, Hirosi Sobukawa, Nobuharu Noji, Tohru Satake, Shoji Yoshikawa +7 more | 2008-04-01 |
| 7285010 | TDI detecting device, a feed-through equipment and electron beam apparatus using these devices | Tohru Satake, Takeshi Murakami, Kenji Watanabe, Nobuharu Noji | 2007-10-23 |
| 7241993 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2007-07-10 |
| 7223973 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2007-05-29 |
| 7220604 | Method and apparatus for repairing shape, and method for manufacturing semiconductor device using those | Tohru Satake, Nobuharu Noji, Kenji Watanabe | 2007-05-22 |
| 7176459 | Electron beam apparatus | Kenji Watanabe, Tohru Satake, Mamoru Nakasuji, Takeshi Murakami, Tsutomu Karimata +2 more | 2007-02-13 |
| 7138629 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Shoji Yoshikawa +7 more | 2006-11-21 |
| 7129485 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Kenji Watanabe, Takao Kato +7 more | 2006-10-31 |
| 7115354 | Microfabrication of pattern imprinting | Katsunori Ichiki, Tohru Satake, Yotaro Hatamura, Masayuki Nakao | 2006-10-03 |
| 7109483 | Method for inspecting substrate, substrate inspecting system and electron beam apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Kenji Watanabe +6 more | 2006-09-19 |
| 7098457 | Electron beam apparatus and device manufacturing method using same | Ichirota Nagahama, Yuichiro Yamazaki, Kenji Watanabe, Tohru Satake, Nobuharu Noji | 2006-08-29 |
| 7095022 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Kenji Watanabe, Takao Kato +7 more | 2006-08-22 |
| 7075072 | Detecting apparatus and device manufacturing method | Takeshi Murakami, Tohru Satake, Nobuharu Noji, Ichirota Nagahama, Yuichiro Yamazaki | 2006-07-11 |
| 6992290 | Electron beam inspection system and inspection method and method of manufacturing devices using the system | Kenji Watanabe, Hirosi Sobukawa, Nobuharu Noji, Tohru Satake, Shoji Yoshikawa +7 more | 2006-01-31 |
| 6949735 | Beam source | Katsunori Ichiki, Kenji Watanabe, Tohru Satake | 2005-09-27 |
| 6909092 | Electron beam apparatus and device manufacturing method using same | Ichirota Nagahama, Yuichiro Yamazaki, Kenji Watanabe, Tohru Satake, Nobuharu Noji | 2005-06-21 |
| 6855929 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former | Toshifumi Kimba, Tohru Satake, Tsutomu Karimata, Kenji Watanabe, Nobuharu Noji +6 more | 2005-02-15 |
| 6671034 | Microfabrication of pattern imprinting | Katsunori Ichiki, Tohru Satake, Yotaro Hatamura, Masayuki Nakao | 2003-12-30 |